Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm)

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: 600mm, CE Compliant: -

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

MHZ

Single acting type, Normally closed Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported 12-2-17 17 Series MHZA2-6/MHZAJ2-6 Construction: Standard Type MHZA2-6 Double acting/With fingers open Single acting/Normally open e o @4 @1 i !1 w !2 !4 !0 !5 !6 !7 t r !3 u q @3 @2 Single acting/Normally closed !8 !

MHZ

For details, refer to Pneumatic Clean Series catalog. 12-2-29 29 Series MHZ2 Construction: MHZ2-6 Double acting/With fingers open Single acting/Normally open e !0 @1 @4 o !2 w i !4 !6 !1 !7 !8 !9 u q @3 @2 !3 r t !

3

Rated voltage Lead wire color q w DC Black Red 100 VAC Blue Blue 200 VAC Red Red Other AC Gray Gray * There is no polarity. Description Part no. Seal VCW20-15-6 Note) Please order separately. 237 A

VK3000

VV5K3-(S)41(-Q) Manifold base VV5K3-(S)42(-Q) Applicable base VV5K3-20(-Q) VV5K3-21(-Q) Manifold base Manifold gasket for blanking plate Applicable base: In common for all types of VV5K3 (-Q) models Mounting Screw Tightening Torques Mounting Screw Tightening Torques Caution Body ported Base mounted Caution Manifold gasket Screw assembly VK3000-6-1A VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note)

C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

JA/JAH/JB/JS

-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51 62.5 80.5 101 129 149 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 6 6 7

JA/JAH/JB/JS

24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 112 200 300 500 1300 3100 5000 7900 15300 20 112 200 1100

Compact Manifold Regulator

Metric size Inch size Stations Symbol Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.