2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k F: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. applied voltage: 28 V, Max. load current: 80 mA, Internal voltage drop: 1 V or less C: Analog output: 1 to 5 V or 0 to 10 V can be selected.

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

Fieldbus system EtherCAT compatible SI Unit

V1.1 , Restore -97No.EX-OMA1023 Enumeration data definion (continued) Index Value Text 1 Digital Input 0814 5 Power2 (Port classB) 0 One time switch off (PowerOffTime) 0815 1 Switch PortPowerOff (permanent) 2 Switch PortPowerOn (permanent) 0 NO_DEVICE 1 DEACTIVATED 2 PORT_DIAG 3 PREOPERATE 0816 4 OPERATE 5 DI_C/Q 6 DO_C/Q 254 PORT_POWER_OFF 255 NOT_AVAILABLE 0 VALID/PDOUTVALID 1 INVALID/

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

PFxx-OMA1007

8 1/4 274.3 214.7 81.7 134.4 25.6 46.2 24 40.1 AMS30A-#C 1/4 3/8 291.8 214.7 87.9 134.4 29.1 46.2 30 40.1 AMS40A-#C 3/8 1/2 334.8 214.9 92.4 151.6 32.6 46.2 36 40.1 AMS60A-#C 3/4 1 401.8 214.8 93.7 151.6 42.1 46.2 46 40.1 Dimensions with bracket Part number K F G H Q R S T U V W AMS20A-#C 85 70.2 103.2 49.7 35 7 14 54.5 6 47 42.5 AMS30A-#C 85 72.2 104.2 57.2 35 7 14 54.5 6 47 42.5 AMS40A

SMC

/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Material MXF Black painting 1 Rod cover Aluminum alloy NBR Rod seal @8 q Black painting 1 Head cover Aluminum alloy MXW NBR Piston seal @9 w Hard anodized 1 Cylinder tube Aluminum alloy NBR Cylinder tube gasket #0 e Chromate 1 Piston Aluminum alloy MXP Piston gasket NBR #1 r Hard chrome plated 1 Piston rod Carbon steel Cushion seal NBR #2 t 1 Bush Zinc bronze die cast MG Lock piston seal

Refrigerated Air Dryer

4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519

Series VCL

size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46

MLGC

Connector G59W G5PW K59W G5BA P P P P P P P 3 wire (NPN) K I.C. 5V, 12V Diagnostic indication (2 color) Relay, PLC 3 wire (PNP) K 24V K 12V 2 wire Watrer resistant (2 color) Grommet K With timer 3 wire (NPN) P P K I.C. 5V, 12V G59F Latch w/ diagnostic output (2 color) P K 4 wire (PNP) Latch with diagnostic output (2 color) H7LF P P K 0.5m Ex) B80C 5m Z Ex) B80CZ 3m L Ex) B80CL

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

15

1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

MLGP

8 (Plug) ML1C XA depth 6 H7 2-Rc 1/8 PB GA GB DJ K PA + Stroke Q XA depth 6 H7 S G IE FA FB C + Stroke -X B + Stroke E Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

MLGP

8 (Plug) ML1C XA depth 6 H7 2-Rc 1/8 PB GA GB DJ K PA + Stroke Q XA depth 6 H7 S G IE FA FB C + Stroke -X B + Stroke E Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

MK

P O N S Model MKB12-llN MKB16-llN 18.5 M3 X 0.5 4 20 29 8 8 21.5 M4 X 0.7 5 25 36 11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.