CNA

6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18 x 1.5 M8

CNA

GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11

33

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = Thermo-chiller

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Wedge Cam Operation Gripper Series MHK2

Wedge Cam Operation Gripper 2 Finger 12, 16, 20, 25 Series MHK2 Wedge cam actuation for precision/rigidity Dust cover for adverse environments Compact and Lightweight Mounts from 3 directions Auto switch capable Q Q Q Table of Contents Q Q Q Q Product Features .page 4-5 Operation Guide/Safety Instructions .page 6-9 How to Order .page 10 Specifications .page 11 Construction

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 3.6 3.6 +10 +10 0 0 30 30 +1 1 +1 1 +6.4 +6.4 +20 +4.9 +20 +4.9 50 50 +25 +25 +51.4 +51.4 +40 +49.9 +40 + 9.9 13-11-110 15 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female

53

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

VCC

C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

MXH Series Compact Slide

10 1 10 1 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 6 20 1 20 16 16 0.1 0.01 10 10 6 6 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 5 Load eccentricity 100mm Graph 8 Load eccentricity 100mm Graph 11 Load eccentricity 100mm 1 10 10 0.1 1 Weight m(kg) Weight

Modular F.R.L. Unit

Metal bowl with level gauge w q With bowl guard e q w Drain guide 1/4 N R q w Non-relieving type Flow direction: Right to left Note 1) The circled numbers indicate the order in which the units are assembled.

Series MXP Precision Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q 157 Q MXP Series 6, 10, 12, 16 Traveling parallelism Traveling parallelism: 0.004mm Parallelism: 0.02mm Traveling parallelism on guide block top side Traveling parallelism on guide block side Run out indication when body is fixed on standard base and cylinder is fully extended. MXP10,12,16 Cylinder with built-in linear guide.

HRL

Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to

CM2

12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e f B3 Stroke Bore size (mm) 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 181

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

Compact

1 1 2N q w e r t y u i o !

MXW Series Long Stroke Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 133 Q MXW Series 8, 12, 16, 20,25 Linear guide table provides long stroke Linear guide Long stroke (up to 300mm) Linear guide provides long stroke and smooth operation without vibration.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.