0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Base Mounted Metal Seal/Rubber Seal Series VQ

White (Gray) [Gray]: B side solenoid () Example) Lead wire length 1000 mm VQ1110-5LO 3 pcs. AXT661-14A-10 3 pcs.

Series MXP Precision Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q 157 Q MXP Series 6, 10, 12, 16 Traveling parallelism Traveling parallelism: 0.004mm Parallelism: 0.02mm Traveling parallelism on guide block top side Traveling parallelism on guide block side Run out indication when body is fixed on standard base and cylinder is fully extended. MXP10,12,16 Cylinder with built-in linear guide.

Stainless Steel 316 Fittings

25.3 23.3 26.7 28.1 29.7 30.1 33.5 29.7 30.1 33.5 31.3 31.7 35.1 31.3 31.7 35.1 33.1 36.3 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 10 14 10 14 10 14 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 2.5 4 1.8 1.6 d 5 8 Applicable tube 3 4 2.3 2.6 H1 H2 4 6 3.3 6 5.8 10 M A L 14 6 8 5.3 6.6 14 17 Connection thread 17 25 17 7.5 10 6.8 30 22 27.1 7.6

53

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

ITV

EXH (3) 10 10 Dimensions not shown are same as on page 828.

Rotary Clamp Cylinders

3 !7 !8 !6 !6 !0 !2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

HRL

Maximum load current 800 mA AC/DC or less1 Contact output signal 1, 2, 3, 4, 5, 6 Minimum load current 5 VDC 10 mA Output voltage range 0 to +10 V Analog output signal 1, 2 Maximum output current 10 mA Output accuracy 0.4% F.S. or less Output voltage 24 VDC 10% 200 mA MAX1 (No inductive load) When using this products power supply, connect pin 1 to pin 2 and the COM side of each contact input

Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

CM2

5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

5 Port Solenoid Valve Series VQZ1000/2000/3000

/8 [4(A), 2(B) port] 10 B A SJ SY SV Approx. 300 (Lead wire length) 68.8 (Rubber seal) 2 x 3.4 (For mounting) SYJ 36 3 SZ 3 4 2 22 VP4 B A 5 3 1 Manual override S0700 1 46.6 69.8 (Metal seal) VQ VQ4 VQ5 + 47.2 VQC 40.4 31.8 R2 R1 PE port 20 14.6 14.6 VQZ 14 X 12 Y 12 10 10 P 7.2 1.1 1.1 M5 x 0.8 (Not used) 13.4 13.4 SQ 21 M5 x 0.8 (External pilot port) 1/8 [1(P), 5(R1

Fieldbus system EtherCAT compatible SI Unit

IOL_Autostart DI_C/Q Set as digital input. DO_C/Q Set as digital output -74No.EX-OMA1023 IO-Link master unit parameters (3) No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

Free Mount Cylinder Series CU

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional

Environment

Nil Without cable 1 1.5 3 3 5 5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on fixed parts.

33

Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass, Ceramic, Carbon, PP , PE, POM, EPDM, PVC Power supply Single-phase 100 VAC 50/60 Hz Allowable voltage range 10% Fuse A 15 Power cable size Note 10) 3 cores x 14 AWG (2.0 mm2), 3 m Electrical system Applicable earth leakage breaker capacity Note 7) A 15 Rated operating current (50/60 Hz) Note 3) A 7.1/

High Purity Chemical Valve

4, 6 1/8, 3/16, 1/4 LVC3m 8 6, 8, 10 1/4, 3/8 LVC4m 10 10, 12 3/8, 1/2 LVC5m 16 12, 19 1/2, 3/4 LVC6m 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

Pin Clamp Cylinders

Bolt 14.50.1 14.50.1 Manually unlocking Lock ring 1) Remove the dustproof cover. 2) Screw the commercially available bolt (M3 x 25 L or more) into the lock ring shown on the left and raise the lock ring toward the head side. 3) The lock ring and piston rod form a right angle, and the lock is released. (29) LOCK 27 Head side 70 D d 0 0.05 Q Q K SR C 120 45 15.5 14.5 26 (4) MK 8 to 10 14 14