1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

In case of mixed wiring, add the option symbol "-K".

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

IDX-OM-W017

3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-Vl Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

6/4 R Bleed port F S U D N Bracket (Option) J M T (11) Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K) : Max. 3.5 ARP40(K) : Max. 5 OUT IN 1021 1021 Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

6/4 R Bleed port F S U D N Bracket (Option) J M T (11) Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K) : Max. 3.5 ARP40(K) : Max. 5 OUT IN 1021 1021 Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center

Title not found

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

Air Cylinder CP Series Cylinder Positioner Assembly

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

Basic Type/Direct Mount Type

A (Operating direction) CY3RG20 (mm) B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67 66 82 218 218 86 106 82.5 75.5 14 264 95 16 264 95 Other dimensions are the same as basic type.

Cylinder

I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

Electromagnetic Digital Flow Switch

Temperature characteristics Ambient temperature 5% F.S. (25C reference) Fluid temperature 5% F.S. (25C reference) Operating pressure range*2 0 to 1 MPa Proof pressure*2 2 MPa Analog output Response time*3 0.5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Current output Output current: 4 to 20 mA Max. load impedance: 600 Power supply voltage 24 VDC 10% Current consumption

Thermo-chiller

mA TYP Input impedance 4.7 kW Input signal Rated load voltage 48 VAC or less/30 VDC or less Max. load current 500 mA AC/DC (Resistance load) Min. load current 5 VDC 10 mA Output voltage 24 VDC 10% 200 mA MAX (No inductive load) Contact output signal Product side Customer system side 1 Contact input signal COM 1 k 2 Contact input signal 1: Run/Stop (Default setting) 4.7 k 1 k 3 Contact input

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

IR1000/2000/3000

Description IRV1000 IRV2000 IRV3000 Bracket P53801018 P53802016 P53803013 Pressure gauge GZ33-K-01 GZ43-K-01 GZ43-K-01 Precision of pressure gauge within 3% (Full span) 14-5-17 17 Series IR1000/2000/3000 Construction !5 !5 t o o o !0 t !0 o !

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs. 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.