o 3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)
3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)
(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100
-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50
Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.
V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W023 i i 2 6 WARNING !
Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')
Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48
14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12 18 10.5 21.5 14 16.5 9 8.5 22.5 16 40 40 37.5 38 35 82.5 72.5 20 24.5 17 23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 CY
material 1 Resin Refer to . on page 14 for replacement parts. 10 Sound absorbing material 2 Resin 11 Valve plate PBT Specific Product Precautions Refer to m on page 14 for replacement parts. 12 Knob POM 13 Needle Brass (Electroless nickel plating) 14 Port block assembly Aluminum alloy/NBR/Stainless steel Refer to b on page 14 for replacement parts. 15 Supply valve, Release valve Refer to
RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ
RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ
Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd
74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement
[C] 201 HRSE Series Basic Type Pump Capacity 012 018 HRSE -A-20/23 012 018 024 HRSE -A-10 0.14 0.14 14 14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port
0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Station n L1 L2 L3 Station 20 236.5 228.5 220.5 3 58 50 42 6 89.5 81.5 73.5 8 110.5 102.5 94.5 10 131.5 123.5 115.5 Station 2 47.5 39.5 31.5 4 68.5 60.5 52.5 5 79 71 63 7 100 92 84 9 121 113 105 11 142 134 126 12 152.5 144.5 136.5 13 163 155 147 14 173.5 165.5 157.5 15 184 176 168 16 194.5 186.5 178.5 17 205 197 189 18 215.5 207.5 199.5 19 226 218 210 4-4-16 3 Port Pilot Operated Solenoid
However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.
VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.
Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.