VDW Series

Enter together in order, counting from station 1 on the D side.

3 Port Air Operated Valve Series SYJA300 1

44) (36) 21 28 29 25 27 34 18 X 21 14 1 R P 3.5 40 4 26 40.5 26 34 4 48.7 10 2-M4 x 0.7 2-4.5 54.2 55.5 (3.6) 54.2 (Mounting screw) (For mounting) 8 1 (P, A, R port) 0.8 54.5 P R 1.8 (Breathing hole) 1.8 (Breathing hole) 20 16 14.5 With filter (80 mesh) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8 1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

Precision Regulator

point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

AC Servo Motor Driver (Pulse input type)

7 800 r/min 5.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

MXS Series Air Slide Table

22.7 17.7 14.7 12.7 4.7 90.7 82.7 42.7 34.7 65.7 57.7 4.7 9.7 22.9 6 119.6 111.6 36.6 16.6 28.6 26.6 21.6 18.6 16.6 8.6 92.6 84.6 35.6 27.6 63.6 55.6 8.6 13.6 27 6 96.5 104.5 41.5 21.5 33.5 31.5 24.5 23.5 21.5 13.5 89.5 81.5 40.5 32.5 56.5 48.5 13.5 16.5 : D-F9BW, D-F9NW, D-F9PW 2 color indication solid state switch: D-F9BWV, D-F9NWV, D-F9PWV Stroke B Stroke E Model Operating range A 40

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Name For Fieldbus communication q EX9-ACmEN-PSRJ Communication cable for EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK (Plug/D-coded/RJ45) K w PCA-1446566 Communication cable for EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK (Plug/D-coded) r PCA-1567720 Communication cable for CC-Link (Socket) Communication cable (With connector on one side) K t PCA-1567717 Communication cable

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)