OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0500 (5")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 1000 (10")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0400 (4")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 1400 (14")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 1300 (13")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 2200 (22")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 1900 (19")

Cylinder (Tube) Inner Diameter(φ): 2 1/2", Stroke(mm): 1 1/2", Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications: None

Cylinder (Tube) Inner Diameter(φ): 2 1/2", Stroke(mm): 13", Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications: None

Cylinder (Tube) Inner Diameter(φ): 2 1/2", Stroke(mm): 19", Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications: None

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0150 (1 1/2")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0350 (3 1/2")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0800 (8")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 2000 (20")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 2400 (24")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0100 (1")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 0200 (2")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 3800 (38")