Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

cable 6 to 12 D D K F G1/2 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port

Compact Cylinder with Lock Series CLQ

Bore size (mm) Auto switch mounting surface 20, 25 63, 80, 100 32, 40, 50 Port side Port side Port side C A C A C A B B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model A, B, C sides Port side Port, A, B, C sides Port, A, B, C sides 1. BQ-2 2. BQ2-012 Two kinds of auto switch mounting brackets are used as a set.

58

f C B h + l A K N N H F F ZZ + l + 2 x strokes S + Stroke H + Stroke ZZ + 2 x strokes V W Cushion valve Port 4 x J G G 2 x P (Rc, NPT, G) M Width across flats KA Width across flats KA MM MM With rod boot (Both sides) E E D D e e C B l + Stroke l AL AL C B f f A K N N A K h + l h + l + Stroke S + Stroke ZZ + 2 x l + 2 x strokes (mm) Bore size (mm) Stroke range (mm) P S N MM M K KA W V J G

IDX-OM-W011

. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15

IDX-OM-W016

. 12 3 Chapter 13 Specification for Option V 13 1 Safety instructions . 13 1 13 2 Specifications . 13 2 13 3 How to perform maintenance . 13 2 13 4 Electric circuit . 13 2 Chapter 14 Service Record 14 1 Service Record . 14 1 IDFA Series Table of Contents 2 IDX-OM-W016 Air dryer i Safety Instructions i Safety Instructions Be sure to read and comprehend important cautionary notifications in

JXCx-OMX0009

(b) Vcc B-1 Brown 12 5 5m GND A-1 Black 13 8 8m* A B-2 Red 7 A A-2 Black 6 A 10m* B B-3 Orange 9 B 15m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 C 20m* SD-(TX) A-4 Black 10 Black 3 * Produced upon receipt of (c) Signal name Terminal No.

XL

XL -50 XL -63 XL -80 (a) 1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

Plate Cylinder

Series MU Accessory Bracket Dimensions Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) 2 x 2 x 2 x 2 x CDH10 (mm) (mm) CA 53 67 85 103 122 CB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 CH 11 13 13 17 19 CI 17 22 27 32 38 CJ 7 10 10 14 16 DA 53 67 85 103 122 DB 23 27 31 37 48 DDH10 DE 3.5 3.5 3.5 5.5 6 DF 4 7 10 12 14 DH 11 13 13 17 19 DI

ML2B

G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

MXS Series Air Slide Table

3.2 6.5 7 7 15 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 3 deep +0.025 0 3H9 3 deep +0.025 0 HA GA Cross section AA Cross section BB (mm) Model F 25 25 40 50 38 50 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Filter Regulator

NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -13- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: Semi-standard: C Piping port Piping port (9) Part No. (9) Part No. thread ty pe thread ty pe Rc Rc AD27-D AD27-C-D G G NPT AD27(-Z)-D NPT AD27-C(Z)-D Appearance and part No.

DOC1001322

Offset temperature Sets offset temperature. -20.0 C to +20.0 C [By default] 0.0 C Selects the offset mode. [ ] Disabled OFF / 1 / 2 / 3 [By default] OFF [ ] MODE 1 (2) Offset Mode Offset mode [ ] MODE 2 [ ] MODE 3 About offset function This function controls the circulating fluid discharge temperature with offset.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x

SFOD-OMT0005CN

(1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V OFF -28- (3)((2)) DC24V M24V EMG () 0V DC24V Ry (1 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (2 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (3 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (1)DC24V M24V EMG , (2)(M24V)(SETUP ON) (M24V) (3

LJ1H

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.