High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

Thermo-chiller

50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 30 min 20 min 14 min 10 min Standard item 6 min 4 min Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v 2 min Operating time 1 min 30 s 20 s Max. 10 s Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Wedge Cam Operation Gripper Series MHK2

10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.

Auto Switch Guide

10 l) Auto switch mounting nut Auto switch spacer Auto switch mounting nut 1.

Cylinder with Lock Series CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

7

For Air (Orifice diameter: 10 mm, 15 mm, 20 mm, 25 mm) How to read the graph The sonic range pressure to generate a flow rate of 6000 L/min (ANR) is as follows.

1.63

less, V = 400 mm/s 10 10 25 Load mass m (kg) Load mass m (kg) 25 20 1 1 20 0.1 0.1 10 100 10 100 Eccentric distance L (mm) Eccentric distance L (mm) (13) Over 101 stroke, 200 stroke or less, V = 400 mm/s 10 Load mass m (kg) 25 1 20 0.1 10 100 Eccentric distance L (mm) 506 Model Selection MGPW Series L L m m Vertical Mounting Operating pressure 0.5 MPa Ball bushing MGPWL32 to 63, MGPWA32

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

Thermo-con/Rack Mount Type

capacity [W] Facility water temperature 35C Facility water temperature 20C 1500 1500 1000 1000 Facility water temperature 20C Facility water temperature 10C 500 500 Facility water flow rate: 10 L/min Facility water flow rate: 10 L/min 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR012-W Circulating fluid: Tap water

ZR

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-10 10 Series ZR Large Size Vacuum Module: Ejector System Ejector Unit/Large Flow Type (L): Max.

70pvpump

min (ANR) Air consumption 200 l/min (ANR) 30 30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min)

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

LEC-OM02904

DCDC 4 2 RA 11 27 11 (c) AERSBAN-SET SD (AB) 40 [mm] 2-5 2-5 17.5 30 L 10 L B0.3 7 A C 11 3 6 240.3 -0.2 35 0 24 0 6 22 M4 ()M4 35 .

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Shock absorber MY3B stroke adjusting unit Tightening torque for holding bolts (Nm) Same side Tightening torque Bore size (mm) Unit L H L H L H L H 1.2 1.2 3.3 3.3 10 3.3 10 H L H L H L H 16 0.6 25 3.0 40 12 Adjusting

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

mm 005 500 mm 010 1000 mm 030 3000 mm 050 5000 mm 100 10 mm Straight connector type Angle connector type M12 M12 44.7 L 14.9 14.9 40.7 6 6 32.3 28.3 25.3 25.3 L M12 M12 Terminal no.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

They should be used only to provide support. q l 50 m 40 (450) 30 MY2C40 l l 20 (380) MY2C25 MY2C16 w 10 0 2000 1000 mm 1500 500 Support spacing l 8-13-20 21 Mechanically Jointed Rodless Cylinder High Precision Guide Type Series MY2H/2HT 16, 25, 40 How to Order MX MTS H MY2 G 16 300 L M9N MY Number of auto switches CY Guide type 2 pcs. 1 pc. n pcs.