Proposals for Energy Saving

C D, T G, C S T Note) S L, Z S L, Z Thread AC Flange DC Note) Surge voltage suppressor is attached to the lead wire.

V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Air Cylinder

Technical Data * The bracket is shipped together. 183 CM2 Series Single Clevis (C) CM2C Bore size Stroke Z CD +0.058 0 Effective thread length FL H1 G NN Width across flats B1 G 2 x P (Rc, NPT, G) I NA CI E D NA CX 0.1 0.2 AL A K F H MM U L RR Width across flats KA S + Stroke Z+1.2 0 + Stroke ZZ+1.2 0 + Stroke With rod boot l 8 8 Width across flats B3 e JH JW f h ZZ+1.2 0 + Stroke Cushion

•

ZZ ,. 2 )( strokes G 2 , P M Cushion valve '" c-Wid th across flats KA G -J. Width across flats KA . MM / (Rc. NPT. G) .. I ftM With rod boot {Both sideS) %[ 'il [~ ~II In t ~ !'-'" UC B U+ 211t+ 2xst/Okes C/l Bore size Stroke range 0 G AL A.

VFS

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

CQ2

C Mounting bolt Model No. Mounting bolt Model No.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.

Fluoropolymer Piping Equipment

) L2 M3 M3 F F C side A side C side A side 1/4 H3 (E3) G 1 G 25 H3 L3 (L1) (L1) (L3) Class 2 to 5 Class 2 to 5 Type T3 Type T4 Class 6 Metric Size Model A side (Left) B side (Center) C side (Right) B E1 E2 E3 F G H1 H2 H3 L1 L2 L3 M1 M2 M3 Min. port size Applicable tubing O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

F Nil Rc G N T NPT NPTF Brackets are not installed.

JIS Standard Hydraulic Cylinder

Series Dimensions Basic type: CH2EWB, CH2FWB 2 x Rc P GA J M GA R MM MM D E D E Width across flats G Width across flats G C MA MA B F T Air release A K K F T NA NA A S + Stroke H + Stroke H ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) B C F R J M T GA NA P S 32 25 to 800 38 58 M10 x 1.25 32 11 3/8 158 16 39 37 11 40 25 to 800 65 45 32 M10 x 1.25 11 3/8 12 158 42 36 11 50 25 to 800

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

CV/MVGQ

RS Q G ND hole H10 RS H A Rod dg RZQ +0.2 0 NX MI W S CEP1 Material: Rolled steel Material: Brass Material: Iron CE1 Applicable bore size A1 L1 L MM Part no. Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no.

CV/MVGQ

RS Q G ND hole H10 RS H A Rod dg RZQ +0.2 0 NX MI W S CEP1 Material: Rolled steel Material: Brass Material: Iron CE1 Applicable bore size A1 L1 L MM Part no. Y-J010B Applicable bore size Applicable bore size d C C B d H B H Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

Auto Switch Guide

RS Q G RS H A RZQ Weight MI W S Auto Switch Internal Circuit D-G39A (g) CEP1 None 110 110 D-G39A D-K39A Auto switch model DC (+) Terminal no. 1 CE1 Lead wire Main circuit of switch Main circuit of switch OUT Terminal no. 2 CE2 ML2B DC () Terminal no. 3 Dimensions C J G5-S G 1/2 D-K39A CV (Applicable cable O.D. 6.8 to 9.6) OUT (+) Terminal no. 1 MVGQ CC Tightening gland RB OUT () Terminal

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure