ZB-OM00301

() () () () () () () Q1 N.C. () () () () () () 5 DC24V Q2 () () 6 DC12V Assy 1) Ass'y 2 L L AXT661 LO L M L2) (mm) 300 MO L2) 14A ()()() 6 600 (NC) 1) 10 1000 13A () () 20 2000 300mm 30 3000 3 Ass'y ZB1-VQ110U(M1.7X15)2 2)M ZB1-VQ110U-B (M1.7X22)2 3) ZB1-VQ110L(M1.7X22)2 ZB1-VQ120U(M1.7X15)2 B () ZB1-VQ120U-B (M1.7X22)2 3) ZB1-VQ110(M1.7X15)2 4) 3 ZB1-VQ110-B (M1.7X22)2 V Assy

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

VFRA3000

VFRA4211-03 2 position double 1.2 1 8 65 (3.6) 67 (3.7) VFRA4211-04 VFRA4311-03 3 position closed center 1.2 1 8 57.6 (3.2) 1.1 1 8 57.6 (3.2) PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Power Valve: Economy Valve Series VEX5

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System A B C D E F G Solenoid valve Speed controller AS420-04 AS500-06 AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 Tubing diameter x Length SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m Silencer AN40-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900

CUJ

more KJS23-M3 KJS04-M3 KJH23-M3 KJH04-M3 KJL23-M3 KJL04-M3 KJW23-M3 KJW04-M3 M-3AU M-3ALU MU Bore size (mm) 6, 8, 10 Port size M3 x 0.5 DStroke (mm) 4 or more One-touch fitting AS121F-M3-23 -X AS121F-M3-04 AS131F-M3-23 20AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

Refrigerated Air dryer Series IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

PFA/PFW

Panel adapter B ZS-22-02 Output specifications 0 1 NPN (2 outputs) PNP (2 outputs) Specifications Model PFW300-m PFW301-m PFW310-m PFW311-m PFW321-m PFW320-m 0.5 to 4l/min (0.02 to 0.14SCFM) [Setting is 0.6 to 4l/min (0.02 to 0.14SCFM)] 0.05l/min (0.002SCFM) 5 to 40l/min (0.18 to 1.41SCFM) 2 to 16l/min (0.07 to 0.56SCFM) Flow rate range measurement and setting Minimum setting unit 0.5l/min

A

300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000

EXxx-OMO0027

PCA-1558823 Cable with 7/8 inch connector, Socket, Straight 6 m PCA-1558836 Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849 Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927 Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930 Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943 Cable

Booster Regulator/Air Tank

VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03

Soft Start-up Valve AV2000/3000/4000/5000

300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000

.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

.: PNP; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C

.: PNP; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T Base size A, B Port size 5 3 4 6 1 Symbol 04 Port size VVPA450 VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Compact 5-Port Solenoid Valve

2(B) port side: Yellow (DIN rail) (8) 9.5 A A A A B B B B 78.5 66.5 66.2 4 A 4 A 4 A 4 A 47.3 B 2 B 2 B 2 B 2 (5.5) (35) 4.6 (26.1) 5.3 2.2 (12.2) (14.8) 18.6 4 x M4 Mounting hole (Recommended tightening torque: 1.4 N.m) 18 L2 44.8 1.5 18 0.6 m, 1.5 m, 3 m (Lead wire length) (L4) (DIN rail mounting hole pitch: 12.5) (5.3) (Fitting for the type with P/E ports on the U and/or D sides) (L3)