The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

Rotary Actuator/Vane Type

CRJ X Y1 Parallel key dimensions X Y1 CRA1 Z Z h L1 b CRQ2 B port A port 2 x Q3 2 x Q2 B port A port 2 x Q3 b (h9) h (h9) L1 MSQ 4 0 0.030 4 0 0.030 20 MSZ A A A parallel key is used instead of single flat for size 40.

LEC-OM02904

4) RMFES-A(CL3X) AWG19 4 LE-CSM-RB 210 LE-CSB-SA 210 AWG20 2 21/0.18 34.6 1.35 4.70.1 HRZFEV-A(CL3) AWG20 2 LE-CSB-SB 210 LE-CSB-RA 210 (5) AWG20 2 110/0.08 39.0 1.37 4.50.3 (4) RMFES-A(CL3X) AWG20 2 LE-CSB-RB 210 1. d d 2. 10% 3. 4.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.3 Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRB2 2 x 3.5 through 2 x M3 x 0.5 through CRBU2 CRB1 2 x S2 2 x S1 MSU CRJ 2 x 3.5 through 2 x S1 2 x S1 Free mounting rotary actuator CRA1 2 x 3.5 through 2 x M5 x 0.8 (Connection port) CRQ2 B port A port A port B port 2 x R MSQ MSZ Angle adjuster Cap CRQ2X MSQX MRQ Figures above show the intermediate rotation position when A or B port is pressurized.

VKF300

) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

VQZ100/200/300

VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port size {2(A)port} (A) 2 N.C.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

Series: 25A-PFM5, Rated Flow Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Lead Wire: W (w/Lead Wire w/Connector, Rubber Cover for Connector, Silicone Rubber)

Series: 25A-PFM5, Rated Flow Range: 10 [0.2 to 10 (5) L/min], Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Operation Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Lead Wire: w/Lead Wire w/Connector, Rubber Cover for Connector, Silicone Rubber

Series VQ1000 10- Base Mounted 21- Plug-in Unit

U3 U0 U1 U2 U3 S0 S1 S2 S3 Note 2) 2 to 16 stations Note 2) Note 2) Note 2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

(2)Weight (g) 1 4/2 (P A/B)4 5 (A R1)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

(g) 1 4/2 (P A/B)4 5 (A R1)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Series VQZ base mount solenoid valves combine convenience with durability and performance in a more traditional mounting style. Series VQZ Body Ported Solenoid Valves combine flexibility with high performance and long life in an inline body style.