VK3000

Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1

VDW

01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) Flow Characteristics Flow Characteristics ZM10H ZM13H Exhaust Characteristics Exhaust Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa

48

(OL) 4 x NN through U X PW PE VA 2 x P (Plug) H R T 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5

Series IDG

min (ANR) (SCFM) Note 2) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

End Lock Cylinder Series CBG1

+ l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202) 227 (239) 245 + l 303.5 + l 239 (253) + l 297.5 (311.5) + l 80 236 294.5 230 (244) 288.5 (302.5) 253 + l 329.5 + l 247 (261) + l 323.5 (337.5) + l 100 244 320.5 238

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Sine Cylinder Series REC

The plug (M5 x 0.8) in the standard dimensions becomes a relief port. Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Sine Cylinder Series REC

The plug (M5 x 0.8) in the standard dimensions becomes a relief port. Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Electric Actuator Triple Axis P&P Unit

x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44)

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

Antistatic One-touch Fittings Series KA

M5, M6 D L A M Part No.

Please contact us for the latest version.sales@ocaire.com, PRESSURE SENSOR, INSTRUMENTATION, PSE200/300/530-560, AA, PSE200/300/530-560 M5, .16536 lb

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

CG1

73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.