Series VQ1000/2000 10- 21- 5 Port Solenoid Valve Description (SF1 kit) (SH1 kit) (SJ1 kit) (SJ2 kit) (SQ kit) (SR1 kit) (SR2 kit) (SV kit) (SZB kit) (SZBN kit) P kit J kit F kit G kit EX120-SUW1(-XP) Note 1) [EX123D-SUW1] Note 2) NKE Corp.: Fieldbus System (16 outputs) NKE Corp.: Fieldbus H System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System
Description (SF1 kit) (SH1 kit) (SJ1 kit) (SJ2 kit) (SQ kit) (SR1 kit) (SR2 kit) (SV kit) (SZB kit) (SZBN kit) P kit J kit F kit G kit EX120-SUW1(-XP) Note 1) [EX123D-SUW1] Note 2) NKE Corp.: Fieldbus System (16 outputs) NKE Corp.: Fieldbus H System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Applicable tube O.D.: 8 5/16 inch Port size: 1/4, 3/8 (59) IN OUT With float type auto drain H (D) Model Option: P B With drain guide F D J 361 206 293 337 IDG30M, 30HM, 30LM IDG50M, 50HM, 50LM 18 405 171 Drain discharge With float type auto drain With drain guide Drain Drain J H N.O.: Black N.C.: Gray ( ) Maintenance space 100mm or more Thread size: 1/4 (without valve mechanism) Width across
Body Ported Dimensions: Series SY9000 [ ] : AC 2 position double Grommet (G), (H): SYJ9220C8, N9 C10, N11 C12 G H G H 02 03 SY9220G: Approx. 300 H: Approx. 600 147.8 [152.2] [4(A), 2(B) port)] 3/8, 1/4 (Lead wire length) 103.4 Manual override 6.5 4A 2B 18.4 One-touch fitting [4 (A), 2 (B) port] 33.6 (For manifold mounting) 33.2 Applicable tubing O.D.: 8, 5/16" : 10, 3/8" : 12 64.2 61 (5.5
16 CC-Link 001dh 1 1,2,4 * 30 - (9000)h 2 0.01mm (9002)h 1 1mm/s (9003)h 1 1% (9004)h 2 0.01mm (9006)h No. 1 (9008)h 2()/1() 1 (9009)h 4()/3() 1 JOG (0030)h JOG 1 *1 1mm/s 2 (0031)h JOG 1 1 1mm/s 2 (0032)h JOG 1 1 1mm/s (0033)h JOG 1 *1 1% (0034)h 2 (-) 0.01mm (+) (0400)h (040F)h (No.0) 16 (0410)h (041F)h (No.1) 16 (0420)h (042F)h (No.2) 16 . . . . . . . . . . . . .
20 Bore size: 16, 20 4-O counterbore 2-N through E MK(2) Stroke Q 2-P F Y RS Q G RS H A T D RZQ W U MI W S 20 (22) V M 10 (11) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings
LJ1H303NDStroke -F-X70 LJ1H303SEStroke -F-X70 LJ1H303PAStroke K-F-X70 LJ1H303NAStroke K-F-X70 Combinations other than the above cannot be manufactured.
I (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 CD CX D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 I +0.109 0 +0.109 0 +0.109 0 +0.034 -0.015 20 18 13 16 10 8 16 10 12 12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10
G H 9 N-M8 x 1.25 thread depth 16 8H9 +0.036 depth 9 0 Bottom through hole 6.6 F E 8H9 +0.036depth 9 0 Model J N H G F E Z MXW25-100 165 4 65 100 165 115 395 MXW25-125 180 5 60 90 210 105 420 MXW25-150 180 5 65 92 225 110 445 Note) Adjuster bolt Y shown in the section above is attached only on B type(with shock absorber). 152 152 152 Long Stroke Slide Table MXW Series Dimensions MXW 25 Stroke
Applicable tubing O.D.: 8 5/16 inch Port size: 1/4, 3/8 (59) HA IN OUT AT ID AMG (D) With float type auto-drain H With drain guide Model Option: P B AFF D F J 361 206 IDG30M/30HM/30LM IDG50M/50HM/50LM 293 337 18 405 171 AM Misc.
(mm) Operating Piston area (cm2) RHC direction 1.0 0.7 0.5 0.3 200 139 100 60.8 2 R 20 12 MTS 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 CC 490 341 245 149 4.9 H 600 418 300 182 6 R 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R 40 16 1250 870 625 380 12.5 H 1648 1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical
, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500
Applicable cylinder bore (mm) 10 16 20 25 32 2.4 H M4 x 0.7 d 7 B 8.1 C 6.8 D Part no.
0 V6 LEJS 40 500 A H q Accuracy e Motor type *1 r Lead [mm] Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 w Size Symbol Type Output [W] Actuator size Compatible driver Nil Basic type H High precision type V6 AC servo motor (Absolute encoder) 100 40 LECYM2-V5 LECYU2-V5 V7 AC servo motor (Absolute encoder) 200 63 LECYM2-V7 LECYU2-V7 t Stroke [mm] *2 40 63 *1 For motor type V6, the compatible
Basic (B): CG1WB 1011With rubber bumper 2 x M5 x 0.8 Relief port F GA F GA Port on rod end Port on rod end Width across flats KA 2 2 Width across flats KA RA RA 2 x Rc P 1 1 0 E0.05 MM H1 H1 MM D D I 0 E0.05 C R0.4 R0.4 ZZ + 2 Stroke S + Stroke H A AL Width across flats B1 Width across flats B1 H + Stroke A AL K K 8 x J NA C Female rod end effective depth A1 MM ZZ + 2 Stroke H + Stroke H
D z 300 Q F C R E C R E A B1 B1 A B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet
Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56