HRL

100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

Electric Actuator Triple Axis P&P Unit

1000 1100 1200 1300 1400 1500 90 A0 B0 C0 D0 E0 F0 Matsushita Electric Industrial Co., LTD Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Matsushita Electric Industrial Co., LTD Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Standard strokes are available in 100 mm increments.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

SQ1000/2000

Metal seal Closed center SQ1000 SQ1331 33 or less 3.2 (0.18) 25 or less 100 Rubber seal SQ1430 26 or less 3.2 (0.18) 20 or less 100 Metal seal Exhaust center SQ1431 33 or less 4.5 (0.25) 25 or less 100 Rubber seal SQ1530 26 or less 2.9 (0.16) 20 or less 100 Metal seal Pressure center SQ1531 33 or less 3.2 (0.18) 25 or less 100 Rubber seal Dual 3 port valve A B C SQ1 31 33 or less 3.2 (0.18

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90.

PA3000/5000/PAX1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air

Series VQ Metal Seal/Rubber Seal Body Ported

See p.1.10-90 for details.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

XM, XY

80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Conduit terminal: VT317-T DIN terminal: VT317-D 2 x M6 mounting hole For top mounting (M4) Coil fitting position 4 positions per 90 Coil fitting position 4 positions per 90 Manual override (Non-locking) 2 x M6 mounting hole For top mounting (M4) Manual override (Non-locking) DIN terminal facing upward (101.6) VV061 VV100 V100 Max. 10 3 x 1/4 (Coil positioning pin) (Coil positioning pin) S070

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (pilot air supply port) 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump

HRX-OM-Q026

100 110 120 Circulating fluid flow [L/min] Fig. 8-16: Pump capacity (HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-17:

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

100 100 100 239 247 296 320 339 345 44 46 48 51 59 63 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 Dimensions: Auto Feed Tank Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b M Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay