Table of Contents

B port is pressurized. 11-4-9 75 Series CRB1 Dimensions: 50, 63, 80, 100 (With auto switch unit) Single vane type/Double vane type CDRB1BW-S/D (mm) V 6-Q 4-Z through b Keyway dimension l h Model b (h9) h (h9) l ***!

CRB2/CRBU2/CRB1

With auto switch CDRB1LW 50 CDRB1LW 63 CDRB1LW 80 CDRB1LW100 P411020-5 P411030-5 P411040-5 P411050-5 75 Series CRB1 Rotary Actuator with Built-in One-Touch Fitting: 50 Basic type CRB1W50F With auto switch CDRB1W50F- CRB1W50F-E CDRB1W50F-E Applicable tube and size Applicable tube

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port is pressurized. 11-4-9 75 Series CRB1 Dimensions: 50, 63, 80, 100 (With auto switch unit) Single vane type/Double vane type CDRB1BW-S/D (mm) V 6-Q 4-Z through b Keyway dimension l h Model b (h9) h (h9) l ***!

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port is pressurized. 11-4-9 75 Series CRB1 Dimensions: 50, 63, 80, 100 (With auto switch unit) Single vane type/Double vane type CDRB1BW-S/D (mm) V 6-Q 4-Z through b Keyway dimension l h Model b (h9) h (h9) l ***!

V

/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, only DC voltage is available.

CC

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

Refrigerated Air Dryer

page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.

15

50 5 0 Z X Mass and center of gravity of the load 25 Center of gravity 50 Load no.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

HRL

Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Earth leakage breaker Rated current [A] 30 40 50 Electrical system Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW (kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

20 82 36 36 41 20 74 65 90 50 20 8-8-27

HRX-OM-X037

Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10

Refrigerated Air Dryer

] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series IDFBE Optional Specifications 1 Refer to How to Order pages 90 and 94 for optional models.