3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Rotary Actuator/Vane Type

A parallel key is used instead of chamfer for size 40. +4 0 = Max. = 110 e g n a r End of rotation n +4 0 = Max. = 200 o i t e g a n a t r o n R o i End of rotation t a t o R (90) DChamfer (Start of rotation) Start of rotation is the position of the chamfer (key) when B port is pressurized.

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

LEC-OM02904

(MR Configurator2 TM) 4 7 4 4.4 4.2 4.5.2 JOG 4.5 JOG TM) (MR Confignrator2 4.5 (EM1) TM (MR Confignrator2 JOG 4 8 4 TM) 4.5.1 (MR Configurator2 (SW2-1)SSCNET (1) (A) JOG JOG ON/OFF (MR Confignrator2 TM)JOG [r/min] 200 0 [ms] 1000 050 ON OFF (b) ON/OFF (MR Confignrator2 TM) [pulse] 262144 09 [r/min] 200 0 [ms] 1000 050 (CCW)(CW) (CCW) (CCW)(CCW) (CW) (CW)(CCW) (CW)(CW) [s

Heavy Duty Stopper Cylinder

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21 M15 1 point setting/without analog output

BP1000

However under Japanese regulation, only MPa is available in Japan. -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig V Porting Configuration 1) Other range available.

BP1000

Please contact SMC. 95 Process Gas Equipment / Back Pressure Regulator Specific Product Precautions AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Be sure to read before handling.

NAAMS Standards Compliant

250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

RSH/RS1H

300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000

XL-OMY0001

/40 200/50 / AC200V 800/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

Clean Regulator/Fluororesin Type

56 95 Tube extensions 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 16 OUT IN 19 6 38 38 100 886 SRF Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

Check Valve Series AK 1

1 Check Valve Series AK Large flow capacity Low cracking pressure: 0.02 MPa A wide variation of models Model Model Effective area (mm2) Port size Weight (g) 1 8 AK2000-01 25 105 1 4 AK2000-02 27.5 100 1 4 AK4000-02 47 155 3 8 AK4000-03 85 150 1 2 AK4000-04 95 140 3 4 AK6000-06 200 345 AK6000-10 230 315 1 Specifications AS Fluid Air Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa

Ozone Resistant

IR Precision regulator AMD Micro mist separator AFF Main line filter AME Super mist separator AMF Odor removal filter AT Air tank AM Mist separator The bold line is the testing circuit. 5 The residual ozone ratio in pneumatic lines In the lines of lube-type reciprocating compressor, with intake air containing a concentration of 1.1ppm of ozone, the ozone is phased out as follows: Some 95%

SMC CORPORATION OF JAPAN

The SMC VLS software runs on Microsoft Windows Versions 95 and NT (hereafter referred to collectively as Windows). The software has been designed to be both powerful and user friendly.