High Power Cylinder:

H2 NN MM I H1 MK/MK2 ND FY FW NC NB NE D RSQ/RSG RSH Effective Thread FT NF E 10 E 10 A F K N JC JD N NA CE1 S+Stroke WH F B H FX ZZ+Stroke CE2 FZ ML2B (mm) ML1C Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to1000 Eff. thread length 15.5 19.5 19.5 21 Bore (mm) 20 25 32 40 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6

MHL2

0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) 2.2-3 Wide Opening Air Gripper Series MHL2 Example

Transfer

Thrust energy E2 100 10 20 30 40 50 100 200 300 Fs Fs + mgs Fsmgs 400 500 Absorbed energy E W2 max.

MHL2

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Precision Regulator

IR IR IRV VEX SRH Relief flow rate characteristics SRP Possible to relieve (exhaust) air ranged 50 to 4000 L/min (ANR) SRF Back pressure: 0.7 MPa Back pressure: 0.7 MPa ITV 0.7 IR2010 IR201 0.7 IR3010 IC 0.6 0.6 IR401 Set pressure (MPa) Set pressure (MPa) 0.5 0.5 ITVH 0.4 0.4 ITVX 0.3 0.3 PVQ 0.2 0.2 0.1 0.1 VY1 600 500 400 300 200 100 0 5000 4000 3000 2000 1000 0 VBA VBAT Relief flow (L/

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

MGP

1.87 2.17 2.41 2.64 2.88 50 MGP50 1.84 2.19 2.31 2.72 2.78 2.96 3.15 3.33 3.83 4.20 4.57 4.94 63 MGP63 2.18 2.53 2.65 3.06 3.12 3.30 3.49 3.67 4.18 4.55 4.91 5.28 80 MGP80 4.58 4.58 4.81 5.10 5.38 5.67 5.96 6.25 7.08 7.66 8.23 8.81 100 MGP100 7.26 7.26 7.33 7.74 8.52 8.94 9.36 9.77 10.9 11.7 12.5 13.4 7-3.MGPS-( (kg) (mm) (mm) 25 50 75 100 125 150 175 200 50 MGPS50 2.69 3.03 3.64 3.98

Table of Contents

Series MSQ Rotary Table Rack & Pinion Style Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 . Features. Model Selection . Series MSQ Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Size: 1, 2, 3, 7. How to Order . Specifications. Construction. Dimensions . Series MSQ Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Size: 10, 20, 30, 50, 70, 100, 200.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

Compact Electric Actuator Series LG1

Motor specifications 100 200 300 400 500 600 700 800 900 1000 1200 100mm 200mm 300mm 400mm 500mm 600mm 700mm 800mm 900mm 1000mm 1200mm G R Y Matsushita Electric Industrial Co., LTD Mitsubishi Electric Corporation Yaskawa Electric Corporation Motor output 2 100W Power supply voltage 1 2 0 100/115VAC 50/60Hz 200/230VAC 50/60Hz Without motor Feed screw lead (Refer to Table 1 below for applications

Sine Rodless Cylinder Series REA

Model determination 2 Sine Rodless Cylinder Series REA Model Selection Method 2 Precautions on Design 1 Selection Method 40 32 25 500 500 300 200 300 400 Recommended driving force: Fn(N) 200 300 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

Compressed Air Preparation Filter

mm 76 mm 53 mm 76 mm AMG250C AFF4C AMH250C AME250C 200 mm 200 mm AM30-D AFF30-D AMD30-D AMK30-D 1 Modular Connection Type Compressed Air Preparation Filter AFF/AM/AMD/AMK Series Easier replacement of the element Size 50/60 The stopper function prevents the bowl from falling.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250