AC Servo Motor Driver (CC-Link Type)

600 150 300 600 90 180 360 112 225 450 Home position return position data (m) PC07 0 -2000(Less than stroke 1000) / -200(Stroke 1000 or more) Stopper type home position return PC09 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PC10 15 30 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter

SMC Pneumatic Clean Series

1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate l/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

Clean Gas Filter

(Refer to page 300.)

0.01

SFD100/200 AMG SFD200 only Rc 1/4 NPT 1/4 G 1/4 AFF Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.

7ND9071en

Disconnect and remove all cabling which enters the limit switch housing (300). Remove screws (325), 3 pcs. and lift out the limit switch base plate (324) complete with switches, LUI and connector block. Open screw (326) and turn the limit switch housing (300) from the positioner housing. Remove the electronics cover (39). Proceed with the valve controller as applicable.

0.4

Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.

Compact manifold regulator ARM5 Series

0 50 100 150 200 SRF Flow rate L/min (ANR) Flow rate L/min (ANR) ITV ARM5BA-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa ARM5BA-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa 0.7 0.35 IC 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) ITVH 0.5 0.25 0.4 0.20 ITVX 0.3 0.15 PVQ 0.2 0.10 0.1 VY1 0.05 0 0 50 100 200 250 150 300 0 0 50 100 200

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

Digital Gap Checker

m 400 1 m 350 Displayed value 300 5 m 250 200 150 100 50 0 0.5 0.4 0.3 0.2 0.1 0 Actual distance [mm] Nozzle Shape Internal Circuit and Wiring Example ISA3-N NPN (1 output) The nozzle shape must be similar to Fig. 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) Courtesy of Steven Engineering

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

NAAMS Standards Compliant

250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

600 500 400 300 200 100 0 SQ2000 2.4 0.14 0.75 3.1 0.18 0.71 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

Process Pump

(L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3 MPa SUP = 0.3 MPa SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (2 Hz) PAF5413 Air Consumption (1 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 200 100 SUP = 0.5 MPa SUP

Magnetic Separator FHM Series

dimensions 055 55 x t20 100 200 100 x t30 200 x 140 x t40 Magnetic separator Magnetic separator Fluid Iron Content Elimination Performance by Iron Particle Concentration FHMN-055 FHM-100 FHM-200 Fluid: Hydraulic fluid Fluid: Hydraulic fluid Fluid: Hydraulic fluid 100 90 80 70 60 50 40 30 20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500

HRX-OM-W038

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Soft Start-up Valve

Solenoid Valve for 200/220 VAC Specification Warning AC specification solenoid valves with grommet have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200/220 VAC specification pilot valves, this built-in rectifier generates heat when energized.