2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5 x 0.8 thread depth 10 MDHR2-30E Port Location P .C.D.43 (Mounting thread) MHZ 80 MHF 120 MHL MHR

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

MK

3 25, 25: 2 Qty.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 !6 !7 !

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

LVQ

Body class Metric sizes Inch sizes 4 1/8 3/16 6 1/4 10 3/8 12 19 25 1/2 3/4 8 1 2 3 4 5 6 Note) Refer to page 17-5-82 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-88 to 17-5-89 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools.

VFS

137 167 4 112 142 2 62 92 3 87 117 Formula L1 = 25 x n + 12 L2 = 25 x n + 42 L L1 L2 3-8-24 25 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS3000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Max. operating cycle (cpm) Response

SX

Mfg, Co., Ltd. 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 25 cores x 24AWG 21 Brown White Voltage limit VAC, 1 min. 1000 22 Pink Red 23 Gray Red Insulation resistance Mkm, 20C 5 or less For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. 24 Black White 25 White None The minimum bending radius of D-sub connector cable

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

size 80 5 x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type C1 E B 125 5 x 35l SWRM Polished round 22SPCC 154 7.5 22 169 5 125 clevis type A 160 5 x 35l SWRM Polished round 24SPCC 190 7.5 25 205 5 160 clevis type Knuckle bracket Material: Cast iron 3 U (H8) Bore size (mm) Applicable cylinder type Hexagon

Cylinder with Lock Series CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Cylinder with Lock Series CNG Model Selection Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 0.5 100 500 400 300 200

7

11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Low Profile Guide Type

5 !7 !8 @8 i o !0 @3 @2 y u #5 y $5 CY1F15 Detailed view of driving cylinder CY1F25 Detailed view of driving cylinder @7 Section A-A Component Parts Note Material No. Description Note 25 26 27 28 Material No.

Sine Rodless Cylinder Series REBR Direct Mount Type

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment (Nm) Moment (Nm) Moment (Nm) REBHT25, 32 REBHT25, 32 REBHT25

CLS

through) Applicable bore size (mm) Applicable cotter pin Dd9 L l 5 5 Model 4 x 40l 4 x 40l 4 x 40l 4 x 55l 5 x 65l 125 140 160 180, 200 250 IY-12 IY-14 IY-16 IY-18 IY-25 69.5 79.5 4 Dd9 76.5 86.5 4 84.5 94.5 4 2-d 105 115 4 132 144 5 I Type Single Knuckle Joint Material: Cast iron Applicable bore size (mm) A2 E1 MM NX RR1 U1 A1 L1 NDH10 Model I-12 I-14 I-16 I-18 I-20 I-25 125 140 160 180

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

SV

With External Pilot Specifications (Pitch) 24 P = 24 48.6 11 25 11.8 20 14.5 13.7 E 3/5 E 3/5 E 3 E 3 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 4 A A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 C2 C2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE

Fieldbus System

) One-touch fitting [4(A), 2(B) port] U side D side One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 12, 3/8" Applicable tube O.D.: 6, 1/4" 8, 5/16" 10, 3/8" (Station 1) (Station n) P 1 P 1 82.7 63.8 37.6 36.1 13.5 11.6 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A E 4 A 3/5 3/5 E (For DIN rail mounting) 12 10 (Pitch) P = 20.5 25 21.3 23.5 L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81