Series CE1

100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc

AC Servo Motor Driver (CC-Link Type)

The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.

LEF-OM006xx

100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200,

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

MXH Series Compact Slide

m(kg) Weight m(kg) 20 16 10 6 1 20 20 16 0.01 0.1 16 10 10 6 6 0.001 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 6 Load eccentricity 200mm Graph 9 Load eccentricity 200mm Graph 12 Load eccentricity 200mm 1 10 10 0.1 Weight m(kg) Weight m(kg) 1 1 Weight m(kg) 20 16 20 16

AMD

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Temperature characteristics 2% F .S. (25C standard) Accuracy Output type NPN or PNP open collector 2 outputs Output mode Hysteresis mode, Window comparator mode, Error output, Output OFF Switch operation Normal output, Reversed output Max. load current 80 mA Max. applied voltage (NPN only) 28 V Internal voltage drop (Residual voltage) 1 V or less (at load current of 80 mA) Delay time*1 1.5

4/5 Port Air Operated Valve Series SYJA3000 1

69.5 14 35 (For mounting) 89 Manual override 1/8,1/4 (P, A, B port) 29 28 25 21 1.6 14 89 18 2-1.8 (Bleed port) 55 With fiflter (80 mesh) 2-1.8 (Bleed port) 40 25.5 20 11.5 12 R1 R2 P With fiflter (80 mesh) 18 22 22 1/4 27.2 63 1/8 (Piping port) (R1, R2 port) 5-2-28

SYJA3000

Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20 R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40 (1 1/2B) 40 (1 1/2B) 1 1/2 1 1/2 160 160 50 (2B) 50 (2B) 260 260 65 (2 1/2B) 450 80 (3B) 600 Note) Tapered female thread connection conforming to JIS B 0203 is compatible.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

AM X6 AM X15 Body size Body size Options Options (Not available with element service indicator "T") Thread Accessories Thread Accessories Port size Port size Dimensions Dimensions HAl AT IDl Model Port size A 239 252 258 284 B 80 1 8 1 4 3 8 , , AM150 AMG 1 4 3 8 , Model Connection A 240 260 300 380 B 256 300 349 496.5 AM250 80 1 2 AM450 AM550 AM650 AM850 3/4B/FF/10K 1B/FF/10K AFF 3 8 1 2

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

mA NPN open collector Internal voltage drop: 1 V or less (with load current of 80 mA) (PF2D300) Maximum applied voltage: 30 V 2 outputs Environmental resistance Note 4) Output specifications Switch output PNP open collector Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (with load current of 80 mA) (PF2D301) 2 outputs NPN open collector or PNP open collector (same as switch

PF2D

mA Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V Maximum load current: 80 mA Internal voltage drop: 1 V or less (with load current of 80 mA) PNP open collector (PF2D201) Switch output (Real-time switch output, Accumulated switch output) Output Note 3) specifications Accumulated pulse output No. of outputs Output protection NPN open collector

3 Port Solenoid Valve Rubber Seal Series SY100 1

mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking lever type H: 600 mm lead wire LN: Without lead wire LO: Without connector MO: Without connector L P 1 4632 LN and MN types are with 2 sockets.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Series MXP Precision Air Slide Table

20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150

Short Stroke Electric Actuator Series LX

80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7 0.2 0.1 Refer to page 303 for acceleration time. 213