CE

131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc

CE

131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc

MGC

60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

RHC

7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they

Brake mechanism added

Load weight (kgf) Load weight (kgf) 100 80 YES 100 100 80 NO 63 Is the speed within the given range in the diagram? And, within specifications? 63 50 50 40 40 YES YES Does the mounted load exceed the load given in the diagram? 100 200 300 400 500 100 200 300 400 500 Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.

High Power Cylinder Series RHC

12 (120) 1500 25 25 to 700 80 21 (210) 1500 32 32 to 1000 80 33 (330) 1500 40 40 to 1000 80 47 (470) 1500 50 50 to 1200 80 84 (840) 1500 63 63 to 1200 80 127 (1270) 1500 80 80 to 1400 80 Symbol 196 (1960) 1500 100 100 to 1500 80 Note 1) When the standard stroke is exceeded, it is outside the guaranteed range.

CLA

16 41 47.3 39 .cOP-SA 80 la:~ 76.5 66.5 5 4 04X25t eDNA 80 100 20~ .'

Fieldbus System

Absolute accuracy (77F) Current consumption 100 mA or less Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.6 lbs (300 g) Note 1) M12 (4-pin) connector can be connected. Note 2) When input signal exceeds 22 mA, the protection function activates and the input signal is interrupted.

AMF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Self-standing type AMF801/901 Piping Support type AMF800 to AMF1000 20 80 AMF 1 20 80 AMF 0 Body size Body size 80 90 80 90 Port size Port size 100 Vessel shape 20 2B flange 30

PF-OMN0011_C

DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V E 15 V 1 k F420 mA 12 V 300 24 V 600 Max.28 V80 mA 1 V C 15 V 1 k D420 mA 12 V 300 24 V 600 -18No.PF-OMN0011CN-C NPN PF3W30G PNP PF3W30H DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V 30 ms Max.28 V80 mA 1 V 30 ms 2 PF3W30J/PF3W30K DC(+) DC(-) / J15 V 1 k K420 mA 12 V 300 24 V 600 -19No.PF-OMN0011CN-C

AMF

AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

Heavy Duty Stopper Cylinder Series RSH/RS1H

80 300 300 1.0 RS1H80 RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 10 20 30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 20, 25, 32

CE2

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 No.

0.01

0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 322 Clean Air Filter SFD Series Construction SFD100-C Component Parts Material No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1131 20 or less 0.19 0.20 0.80 0.19 0.20 0.79 15 or less Rubber seal 80 2 position 3 position 4 position SQ1230 0.14 0.11 0.63 0.14 0.10 0.62 15 or less Metal seal 80 Double (Latching) SQ1231 0.19 0.20 0.80 0.19 0.20 0.79 20 or less Rubber seal 80 Double (Double solenoid) SQ1230D 13 or less 0.14 0.11 0.63 0.14 0.10 0.62 10 or less Metal seal 95 SQ1231D 20 or less 0.19 0.20 0.80 0.19