Process Pump

-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

Vacuum Pad

M Silicone rubber compliant with the FDA (USA Food and Drug Administration) 21CFR177.2600 elution test is used. M Blue colored pad Easy to distinguish the vacuum pad by color during contamination inspection. M Reduced leakage Sealing skirt design, better sealing performance even for thin films.

HRX-OM-W032

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M If using the JXCm1m-BC, please use the latest version of the JXC-BCW (parameter writing tool). M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m).

Table of Contents

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

CXS

Standard Type: CXS Vertical mounting L L Mounting orientation m m up to 300 up to 400 up to 700 ( up to 800) up to 200 up to 600 up to 100 Max. speed (mm/s) Stroke (mm) All strokes 1 2 6 10 15 Selection graph 3 4 5 6 20 25 32 Horizontal mounting L Mounting orientation m m Refer to the caution notes below.

XL

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Lead wire length symbols: 0.5 mNil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z Auto switches marked with are made-to-order specifications.

4-channel Flow Monitor ( compatible)

range, display unit, enable/disable IO-Link 22 3 Step Setting Mode 29 Simple Setting Mode 31 Function Selection Mode 32 Function selection mode 32 Default setting 32 F 1 Setting of OUT1 34 F 2 Setting of OUT2 39 F 3 Digital filter setting 42 F10 Sub display setting 43 F14 Zero cut-off setting 48 F20 External input setting 49 F30 Accumulated flow value hold setting 50 F80 Power saving mode 51

Table of Contents

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

MY2

m s Load weight kg Load weight kg m s Type of impact s m 1 2 Kinetic energy E1 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s2) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

59(33) 73(47) 61(35) 77(51) 2 position 5 Port Base mounted type (With sub-plate) 1.8 (0.1) Body ported type M5 0.8 76(50) 80(54) 3 position 33 47 35 51 2 position 4 Port Base mounted type For manifold use only Note1) 1.2 (0.067) _ ( ) 50 54 3 position Note1) In case of M5 and mounted on manifold base.

VQ4000

SOL.A (+) SOL.A (+) () Black () Black 0.6 m VVQ4000-44A-8COM () COM () (+) Red (+) Red 1.5 m VVQ4000-44A-15SOL.B (+) SOL.B (+) () White () White 3 m VVQ4000-44A-30Positive common Negative common Positive common Negative common : Number of stations 1 to 16.

Stainless Steel One-touch Fittings Series KG

L1 M L2 D2 D1 Part No.

AC Servo Motor Driver (Pulse input type/Positioning type)

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. *4.

Series KG Stainless Steel One-touch Fittings

L1 M L2 D2 D1 Part No.

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

MGQ

m (kg) Load weight m (kg) Load weight m (kg) -X 20Data Eccentric distance l (mm) Eccentric distance l (mm) Eccentric distance l (mm) MGQM32 to 100 (Slide bearing) MGQL32 to 100(25, 50 stroke) 25 50 MGQL32 to 100-Over 50 stroke Load weight m (kg) Load weight m (kg) Eccentric distance l (mm) Eccentric distance l (mm) Eccentric distance l (mm) 8-20-7 8 Series MGQ Construction Series MGQL Series

HRX-OM-M090

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-M090 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.