Actuation: 4 Position Dual 3 Port N.C./N.C., Seal: Rubber Seal, Function: Standard Type (0.4W), Voltage: 24VDC, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Side Ported ø6 One-touch Fitting, Port Plug Mounting Port: None, Manifold Block: w/Manifold Block, CE Compliant: -

Actuation: 2 Position Single, Seal: Rubber Seal, Function: Standard Type (0.4W), Voltage: 24VDC, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Side Ported ø6 One-touch Fitting, Port Plug Mounting Port: None, Manifold Block: w/Manifold Block, CE Compliant: -

Actuation: 2 [2 Position Double (Double Solenoid)], Seal: Rubber Seal, Function: Standard Type (0.4W), Voltage: 24VDC, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Side Ported ø6 One-touch Fitting, Port Plug Mounting Port: None, Manifold Block: w/Manifold Block, CE Compliant: -

Actuation: 3 Position Closed Center, Seal: Metal Seal, Function: Quick Response Type (0.95W, Voltage: 24VDC, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Side Ported ø6 One-touch Fitting, Port Plug Mounting Port: None, Manifold Block: w/Manifold Block, CE Compliant: -

Actuation: 3 Position Closed Center, Seal: Rubber Seal, Function: Quick Response Type (0.95W, Voltage: 24VDC, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Side Ported ø6 One-touch Fitting, Port Plug Mounting Port: None, Manifold Block: w/Manifold Block, CE Compliant: -

Actuation: 4 (3 Position Exhaust Center), Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)

/N.C.), Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)

Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Port Plug Mounting Port: None, Manifold Block: M (w/Manifold Block)

Actuation: 3 (3 Position Closed Center), Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Port Plug Mounting Port: None, Manifold Block: M (w/Manifold Block)

Air Pilot Operated Series NVSA

o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum. O.C. 2 Spring Rturn AXT 3339-3 3 Spring . Seat AXT 333 PILOI COVEF "8" END Typ "N & O" w/(4) scrws PC 010S1 4B Type "A & B" w/{41 Screws P C 0 1 1 1 1 Screw Pllot Cover (41 6 Spool & Sleeve Ass'y. 440F. S.S. 7 O R i m .

Basic Type/Direct Mount Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked are produced upon receipt of order. Other than the applicable auto switches listed in How to Order, the other auto switches can be mounted. For detailed specifications, refer to page 1479.

LEH_C

42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 1020 150 LEHZ10,16:30(F.S.),LEHZ20,25:25(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N LEHZ 10 K 4 2 1 R 1 2 10 10 D DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

Series H, DL, L, LL Self-align Fittings

M H2 (Hex.) L2 L1 Thread R(PT) Part No.

Process Pump

-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

Vacuum Pad

M Silicone rubber compliant with the FDA (USA Food and Drug Administration) 21CFR177.2600 elution test is used. M Blue colored pad Easy to distinguish the vacuum pad by color during contamination inspection. M Reduced leakage Sealing skirt design, better sealing performance even for thin films.

HRX-OM-W032

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M If using the JXCm1m-BC, please use the latest version of the JXC-BCW (parameter writing tool). M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m).

Table of Contents

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

CXS

Standard Type: CXS Vertical mounting L L Mounting orientation m m up to 300 up to 400 up to 700 ( up to 800) up to 200 up to 600 up to 100 Max. speed (mm/s) Stroke (mm) All strokes 1 2 6 10 15 Selection graph 3 4 5 6 20 25 32 Horizontal mounting L Mounting orientation m m Refer to the caution notes below.