HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

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P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

JSY1000/3000/5000 Series (Non Plug-in)

Dimensions are completely the same as D type DIN connector. 3.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

7.3 D C B A PD port size Metric size: Rc1/8 Inch size: NPT1/8 Supply Port Dimensions [mm] Dimensions [mm] N C4 4.7 C6 4.7 N3 4.7 N7 7.3 A B C D E F ZHP63BM 26 45.8 63 68 12.5 33.8 ZHP80BM 28 57 80 85 18 41.8 ZHP63UM 26 63 66 5 20.3 ZHP80UM 26 80 83 5 20.3 Circuit Adapter Dimensions (by Mounting Style) [mm] G H J K L M ZHPmmmA-mmS 25.7 22.6 5 13 M8 ZHPmmmB-mmS 27.1 21.2 6 17 M10 ZHPmmmC-mmS

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Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing September, 1999 D-SMC.L.A. P-80 (JT)

Large Type Vacuum Unit Series ZR

C4 Double SOL.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount SS5V1 MANIFOLD SV1000. MFLD, PLUG-IN, D-SUB CONNECTOR. VALVE.