Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

Auto Switch Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector 6-16-17 Reed Switch Solid State Switch Grommet 6-16-18 Tie-rod Terminal conduit 6-16-19 DIN terminal 6-16-20 6-16-21 6-16-22 Grommet 6-16-23 Direct D-E73A/E76A/E80A D-R731/R732 D-R801/R802 D-R731C/R732C D-R801C/R802C General Purpose Auto Switch

Precision Cylinder Series MTS

57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers 25 32 Bore size (mm) Part no.

Air Slide Table Series MXQ

41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

AC Servo Motor Driver (MECHATROLINK-II type)

It is necessary to set it on the PLC side according to the kind of PLC. 6.2 The recommended value of the parameter [LEJ] LEJS40 LEJS63 LEJB40 LEJB63 Lead symbol H A B H A B T Series Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para.

PSxx-OMT0001CN

ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -23No.PS-OMT0001CN-E

Applicable Auto Switch Model

(Tolerance 30%) 5.3-42 2 Color Indication Style Solid State Switch/Band Mounting D-G59W/D-G5PW/D-K59W Applicable Actuator Series Grommet Series Bore size (mm) The suitable operating point can be indicated with a green light.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(28) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 40 38 38 37.5 35 34.5 31 32.5 36.5 29.5 35.5 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 50 43.5 43.5 43 40.5 42 38.5 40 44 37 43 24 (36) 27.5 (39.5) 25.5 (37.5) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 63 50.5 50.5 50 47.5 42 38.5 40 44 37 43 32 (46) 33.5 (42.5) 30.5 (44.5) 80 59 48 49.5 46.5 32 (46)

CNS

For details, refer to page 9-15-42. 9-8-22

CM2

Refer to Theoretical Output 1 on page 6-19-7. Theoretical Output Refer to page 6-19-3 for Spring Reaction Force.

Cylinder with Lock Series CNS

14 190 100 230 16 155 to 1000 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 16 180 to 1000 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19 35 1/2 93.5

C95

19 M6 M6 M8 M8 M10 M10 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 12.2 14.2 19 19 23 27 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 15 17 24 24 30 32 4 4 5 5 5 5 30

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

PSxx-OMR0001CN

2 ISA3--B-R ISA3--B-R ISA3--B-LN ISA3--B-RN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19 -23No.PS-OMR0001CN-J 2 ISA-17() Y200T-A() ISA-20() -24No.PS-OMR0001CN-J 2 ZS-31-B(()) ZS-31-C(()) ISA-19-() L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 -25No.PS-OMR0001CN-J 3 SUP () (Nm) (Nm) ISA3 Rc1/8G1

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Description Material Note 13 14 15 16 17 18 19 No.

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Insulation color Dot mark Dot color 12 Light brown Red 13 Yellow Black 14 Yellow Red 15 Light green Black 16 Light green Red 17 Gray Black 18 Gray Red 19 White Black 20 White Red Pulse input usable only with differential. Only 1.5 m cables usable with open collector. (12) L 20 19 Round terminal 0.5-5 Green (22) (25) (40) (10) Weight 2 1 (45) Product no.

Cylinder with Lock Series CLS

PLC: Programmable Logic Controller Refer to pages 14 through 19 for sections related to auto switches.

Slider Type/Ball Bushing Bearing

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

3

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions. Design Selection Warning Warning VX2 1. Cannot be used as an emergency shutoff valve etc. 3.