Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 01 (Rc1/8)
Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01 (Rc1/8)
Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: 01 (Rc1/8)
Gun Type Ionizer Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.
<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (
75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1 77.3 41 78.9 51.9 80.4 58.3 70 80.4 34.3 79.2 44.1 90 50A 77.1 31.1 82.8 41 84.4 51.9 85.9 58.3 70 85.9 34.3 84.7 44.1 34 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series Differs depending on the voltage and electrical entry.
AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)
AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side ported) Mounting screw (side ported) 1 1 Steel Steel Mounting screw (front ported) Mounting screw (front ported) End plate assembly (D side, side ported) End plate assembly (D side, side ported) 2 2 Al Al End plate assembly (D side, front ported
(Including Bracket, Screw, Set Screw) Applicable bore size (mm) Cylinder series C96 32 BT-03 40 BT-03 50 BT-05 63 BT-05 80 BT-06 100 BT-06 125 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)
Port size: 1/4 1570 Air Operated Valve Common Exhaust Type 41 /Individual Exhaust Type 42 VPA300/500/700 Series VPA300 Series/Dimensions Type 41/Common exhaust: VV3PA3-411-02 Stations 72.5 24 2 x 6.5 (For mounting) N.C.
Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1
Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
22 110 19 27 19 34 10 18 9 41 73 3/8 32 50 25 to 800 75 75 52.3 14 69 12 M20 x 1.5 M12 x 1.25 9 105 28 52 28 130 24 26 25 42 16 18 11 41 74 1/2 33 63 25 to 800 90 90 64.3 14 84 12 M27 x 2 M12 x 1.25 13 117 36 65 36 145 30 23 32 50 16 17 13 39 80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18
6 5.4-41 -XC10 Dual stroke cylinder/Double rod !7 Made to order common specifications 5.4-46 -XC11 Dual stroke cylinder/Single rod !8 5.4-52 -XC12 Tandem cylinder !
L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.
Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4
A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14
Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type