High Vacuum Angle Valve G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.
Use a male thread with a length of 10.5 or less for the vacuum port and 11.5 or less for the exhaust port for connection. 23 87.5 73 4 x M5 x 0.8 Thread depth 6 (Mounting hole)3 (Recommended tightening torque: 1.3 to 1.5 Nm) 15 149 15 76 27 73 80 27 Multistage Ejector ZL3/ZL6 Series Pressure switch for vacuum with energy saving function With supply valve and release valve Dimensions ZL3mmm-K1
M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 SMC A2 SMC J 27 H X A1 (mm) R (RC) F (h9) E (g6) H (R) U Model A1 J A2 B G2 V K M2 N C W L D X P G1 Y S Z T M1 Q CDRB1BW 5026 21 29 27 30 29 35.5 38 18 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 25 0 0.052 1/8 67 78 3 6.5 R6 11 32.5 70 34 5 32 66 13.5 39.5 46 50 5.5 60 6.5 R22.5 CDRB1BW 50-E CDRB1BW 63M8 x 1.25
10+0.036 0 12+0.043 0 32 40 M12 x 1.75 50 8 28.3 22 42.5 19 M10 x 1 42.5 45 57 24 M38 x 1.5 14 46.5 G 1/4 35 12 69 12 14.2 Item ZZ S Stroke Bore 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 32 40 126 (151) 68 (93) 89 (114) 118 139 143 164 168 189 214 176 208 201 233 226 258 283 158 (183) ( ): In the case of non-rotating 6-10-26 27
B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16
24.5 25.5 29 27 24 31 30 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 30 29.5 27 25.5 29 27 24 31 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 33.5 33 30.5 26.5 30 28 25 32 31 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40 38 37.5 35 31 34.5 32.5 29.5 36.5 35.5 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5
Horizontal mounting Downward mounting 83 27 94 27 26 32 Center bracket/IZS31-BM Reduced-wiring Fieldbus System 40 15 23 14 3 5.4 18 24 39 Static Neutralization Equipment M5 screw for mounting 2 Ionizer 27 100 Alphabetical Index Length Measuring/ Counter Angle adjustable Ionizer full length (L) Note) Number of center brackets included in a model with brackets.
27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output signal BUSY2 Busy
. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6 (For mounting) 2 x 2.6 (For mounting) 2 x 2.6 (For mounting) 20 20 20 2 x 2.6 (For mounting) (2.3) (2.3) (2.3) 20 (2.3) 23 23 23 23 27
Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27
PV SV HRS Series 5.10 Function to recover from power failure 5-27 HRX-OM-M090 Chapter 5 Display and setting of various functions 5.11 Anti-freezing function 5.11.1 Anti-freezing function The product can prevent the circulating fluid from freezing during winter time.
PV SV HRS Series 5.10 Function to recover from power failure 5-27 HRX-OM-R016 Chapter 5 Display and setting of various functions 5.11 Anti-freezing function 5.11.1 Anti-freezing function The product can prevent the circulating fluid from freezing during winter time.
PV SV HRS Series 5.10 Function to recover from power failure 5-27 HRX-OM-W038 Chapter 5 Display and setting of various functions 5.11 Anti-freezing function 5.11.1 Anti-freezing function The product can prevent the circulating fluid from freezing during winter time.
PV SV HRS Series 5.10 Function to recover from power failure 5-27 HRX-OM-R005 Chapter 5 Display and setting of various functions 5.11 Anti-freezing function 5.11.1 Anti-freezing function The product can prevent the circulating fluid from freezing during winter time.
The time can be set in the range of 1 to 9 hours. 5.5 Advanced setting mode HRR Series 5-32 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions DI filter replacement time 27. Press the [] key. Displays DI filter replacement time setting screen.
/P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3. SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 /P.11 3. PLC (PLC) 15ms30ms /P.36 8.4 USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 (LEC)== (LEC-W2) =USB =PC (LEC) OFF PC (LEC)(PLC )(PC ) 64 - 16.2 () /P.28 7.
/P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.
24 5 19 14.5 11.5 15 10 5 25 19 M22 X 1.5 20.5 4.5 17.5 15 31.5 27 24 Panel Mounting Style CJPB B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14
Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1
11 27 up to 1000 217 172 205 80 82.5 56 3.6 160 45 12 14 27 Y X Y X CJ1 up to 1000 266 210 248 100 102.5 72 4.5 192 55 12 14 30 LS + Stroke LX up to 1000 270 214 252 120 122 89 4.5 196 65 14 16 32 ZZ + Stroke LZ CJP Front flange(F)/Locking at head end (Hl) CJ2 Hl/ Rl/ Wl (mm) Cushion valve Stroke range Bore size (mm) CM2 Fd FZ FY FX FT FE FD B 4-FD Port 32 40 50 63 80 100 up to 700 25 79