Battery-less

External Gripping State Internal Gripping State Finger Finger L L L: Gripping point F: Gripping force L: Gripping point F: Gripping force F F F F Attachment Workpiece Attachment Workpiece LEHF32 LEHF40 Gripping force accuracy: 20% (F.S.)

AFF

(MPa) Pressure drop (MPa) Max. flow line Max. flow line HA AT ID Air flow rate (m3/min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) AMG AFF220A 4 1 2 AFF11B B B AFF 0.1 MPa Max. flow line AM 0.3 MPa Misc.

AMD

(MPa) Pressure drop (MPa) 0.1 MPa 0.1 MPa Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 1 2 AMD450 AMD850 1 2 1 B B 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line 0.1 MPa 0.1 MPa Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 14-20-24 4 Micro Mist Separator Series AMD Construction AMD150 to AMD650

E-P HYREG ® Series VY1 1

.S. 3% F .S. 5% F .S.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Micro Mechanical Valve Series VM1000

) 3 (R) 14.5 14.5 2 x 1/8 2 x 4.6 mounting hole 44 25.4 17 * 0.5 MPa supply F .O.F .* 15 N T.T. 90 Key can be removed at the on and off positions.

VK3000

base: In common for all types of VV5K3 models Mounting Screw Tightening Torques Mounting Screw Tightening Torques Caution Base mounted Caution Body ported VK3000-6-1A Manifold gasket Screw assembly VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

VK3000

F Option Part No. Description Part no.

Ozone Resistant

1200-M3 1400-M3 1000-M5 120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-,

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6(

VDW

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.

Modular Type Filter Regulator Series AW

Contact P/A regarding the specifications for PSI unit and F .

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

modular-press-e

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

Modular F.R.L. Pressure Control Equipment

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

MXW

Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

case of M3 Dimensions with broken lines stand for a locking knob type.