Fluoropolymer Piping Equipment

3.6 LQ1R39-F 10 1/8" 34.5 19.7 7.4 18.5 LQ1R310-F 8 5.5 LQ1R41-F 12 3/8" 9 25 LQ1R4B-F 3/8" 5.8 LQ1R4C-F 1/2" 1/2" 31.5 9 29.5 LQ1R4D-F 3/8" 5.8 LQ1R4G-F 1/2" 1/4" 41.5 21.2 9 21.5 LQ1R5A-F 3/4" 1/2" 25 6 24 9 18 21 43 28 9.4 25 LQ1R42-F 10 7.4 LQ1R43-F 12 1/2" 31.5 9.4 29.5 LQ1R44-F 10 7.4 LQ1R49-F 12 1/4" 41.5 21.2 9.4 21.5 LQ1R51-F 19 1/2" 25 15 29.5 LQ1R5B-F 1/2" 9 LQ1R5C-F 3/4"

CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

39

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

Cylinder with Lock Series CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RB J Method Standard stroke Stroke range (mm) 1 to 29 1 to 49 Bore size (mm) 12, 16 20, 25 DStroke range -X Part no.: CQSYB25-47DC CQSYB25-50DC with 3 mm width spacer inside.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

51

-X Technical Data 367 CG3 Series Allowable Lateral Load at Rod End Allowable Kinetic Energy [J] Table (1) Max.

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

MB

Note 1) Do not lubricate this cylinder. H F ZZ + Stroke Standard model no.

Compressed Air Preparation Filter

Combination example q A Spacer with bracket F S 2 x P (Port size) J M Line Filter AFF30-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc. R V1 V2 Q1 Q21 Q1 C Y300T-D U G Maintenance space E AFF30-03-D AM30-03-D 1 Q2 (Sizes 20, 40) Q1 (Size 30) Combination example w A Spacer with bracket N F 2 x P (Port size) J M S Mist Separator AM30-03-D 1 pc.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

B J A D EA K MM TDe8 AL F KA FA M G N R TT P TX (mm) 125 140 160 180 200 250 300 1/2 90 0.050 0.089 145 115 M14 x 1.5 M30 x 1.5 170 50 47 36 59 43 15 31 14 19 16 35 98 1 50 32 25 to 1000 Lube Non-lube Air-hydro 1/2 90 0.050 0.089 161 128 M14 x 1.5 M30 x 1.5 190 50 36 59 15 47 43 14 31 19 16 35 1.5 98 55 36 30 to 1000 3/4 90 0.050 0.089 182 144 M16 x 1.5 M36 x 1.5 212 18.5 56 40 59 17 53 43

CNG

K BN 8-J BC FZ S + Stroke H ZZ + Stroke FT e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BF BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 38 93 1/8 44.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 Up to 200 22 19.5 17 45 45 103 1/8 51.5 16.5 10

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

REA/REB

Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

10

28 6 Width across flats 10 (4 locations) 24 46 K (70) 30 24 24 Closed E 12.5 12.5 30 Open F 17 17 54 G 4 x M6 x 1 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-20DZ 54 58 71 38 82 122 160 32 120 MHL2-20D1Z 96 100 113 80 142 222 260 68 195 MHL2-20D2Z 116 120 133 100 162 262 300 88 235 J dimension is at fully closed.

IDG

Purge air discharge tubing port for dehumidification Drain Discharge Drain Drain With drain guide Applicable tubing O.D. : E With float type auto-drain J Option: P With drain guide A B Model C D E F H J Port size: 1/4 Port size: 3/8 Port size: 1/4 Port size: 3/8 Rc 1/4 (Without valve mechanism) Hexagon width across flats 17 IDG10M/10HM IDG20M/20HM 211 187 241 212 236 89 170 266 238 268 8