CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No. Note Note Description Material Description Material 40 to 63 Wear ring Resin Aluminum alloy Cylinder body q !8 CE2 12 to 20 Carbon steel Brass Rod end nut !

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

C76

2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

C76

2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

Coolant Valve

) VNA VNB SGC SGH VNC VNC C 65 F VNH E VND 4 x 2 x 18 mouting hole (80F: 8 x 2 x 18) VCC 16 16 A TQ Applicable flange Port 1, 2 65 80 A B C D E F H Note) Model 1 4 1 4 VNC81 -65F VNC91 -80F 210 240 305.5 341.5 175 185 204 235 140 150 65 80 387.5 (389.5) 423.5 (425.5) Note) ( ): CE-compliant product (-Q) 623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M3 x 0.5 0.63 4.5 RHC 1.5 6 M4 x 0.7 MK(2) M6 x 1 5.2 9 RS Q G M8 x 1.25 12.5 12 RS H A M10 x 1.5 24.5 15 Mounting attachment on fingers RZQ When mounting an attachment on the finger, support the finger with a tool like a spanner to prevent twisting.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1 Escapements Series MIW/MIS 8, 12, 20, 25, 32 RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J Ideal for separating and feeding individual parts from vibratory feeders, magazines, and hoppers.

RHC

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Air Fittings & Tubing

(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

MK

Symbol A 11.5 12 B 4.5 4 W 19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style

Series MXP Precision Air Slide Table

Deflection on A when load is applied on F. Table deflection when yawing moment is applied. Deflection on A when load is applied on F. Table deflection when roll moment is applied. Deflection on A when load is applied on F.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

VEX1

Thread Rc(PT) T NPTF F G(PF) N NPT Example of ordering a manifold base: The valve and blank plate for manifold arrangement should be specified in order from the left side of the manifold base (With the A port on your side). (Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

JA/JAH/JB/JS

-24-200 JAH80-30-200 JAH100-42-300 63 M24 x 2 2 28000 22000 22000 RS Q G 5 80 M30 x 2 2.5 54000 36000 36000 100 M42 x 3 3 71000 55000 55000 RS H A Series JAH How to Order RZQ JA H X11 40 F 16-150 MI W S CEP1 Heavy load type Series JAHL (Foot style) Option CE1 Mounting style X11 High temperature specifications 5 to 100C Nil F L Basic style Flange style Foot style Series JAHF (Flange style)