2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads L n Formulas: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323
+ l + Stroke h + l
to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square
3/4 Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 How to Order How to Order 03 BG 30 AW 03 BG 30 AW F 2 N X430 F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol
(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12
Note 2) For M5 and NPT thread type.
T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.
1 2 1 L L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.
x L M F x L M F x L F F L L L 90 Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1MW/CW How to Order MY1 M W 25 300 A93 Number of auto switches Guide type 2 pcs. 1 pc.
U EW d13 KW F Width across flats KV NA AM RR F H + Stroke S + Stroke Rail mounting (A) Band mounting (B) Without magnet ZZ + 2 x Stroke Z + 2 x Stroke Double end boss-cut Cl85KE l Bore size Stroke T (WH + Stroke) G Width across flats KV ND h8 Width across flats SW BE EE BE KK KA ND h8 NA 8 Rod section KW (HR) NA ZZ + 2 x Stroke S + Stroke F F H + Stroke AM Rail mounting (A) Band mounting
Note 2) Bowl assembly for AFD30 to AFD40-06 includes a bowl guard (steel band material). 14-2-44 45 Micro Mist Separator Series AFD20/30/40 Dimensions AFD20 Bracket (Option) L D G F K M J E B H OUT IN C OUT F.R.L.
(20P) G kitFlat ribbon cable with terminal block T kitTerminal block box L kitLead wire S kitSerial transmission F/P/T kit 2 to 24 stations C8 (8) C3 (3.2) 643 (Single) 754 (Double, 3-position) Option: Direct EXH outlet with built-in silencer VQ100 C4(4) J/G/S kit 2 to 16 stations 1021VQ1000 VV5Q11Side VQ101 C6 (6) L kit 1 to 8 stations M5 (M5 thread) F kitD-sub connector P kitFlat ribbon
(20P) G kitFlat ribbon cable with terminal block T kitTerminal block box L kitLead wire S kitSerial transmission F/P/T kit 2 to 24 stations C8 (8) C3 (3.2) 643 (Single) 754 (Double, 3-position) Option: Direct EXH outlet with built-in silencer VQ100 C4(4) J/G/S kit 2 to 16 stations 1021VQ1000 VV5Q11Side VQ101 C6 (6) L kit 1 to 8 stations M5 (M5 thread) F kitD-sub connector P kitFlat ribbon
Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10
1/2-13 1 1/2 1 3/8 2.34 1 4 1/4 2.72 2 7/16 5/8 2 5/8 5 53/64 3/4-16 7/8 1/2 2 1/4 400 (4) 1 1/8 4.7 1 1/2 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1.18 1/2-13 2 1/16 1 3/8 2.34 1 4 1/4 2.72 2 7/16 5/8 2 5/8 5 53/6 3/4-16 7/8 1/2 MORE DIMENSIONS S E E N E X T P A G E D I M E N S I O N S D E TA C H A B L E R E A R C L E V I S T Y P E NC A1D G BORE (INCH) KK A AA B C D DD E EA EE F L LR M XD MM CB J
VQ1000 VV5Q11Side VQ101 C6 (6) L kit 1 to 8 stations M5 (M5 thread) F/P kit 2 to 24 stations F kitD-sub connector P kitFlat ribbon cable T kitTerminal block box L kitLead wire S kitSerial transmission M kitCircular connector C10 (10) 1076 (Single) 1119 (Double, 3-position) S kit 2 to 16 stations C4 (4) Option: Direct EXH outlet with built-in silencer VQ200 VQ2000 VV5Q21C6 (6) Side VQ201
to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square
x 0.8 MXQ-CS6(L)-X11 15 25.5 MX MXQ-CS8(L) 5 18 B MXQ8(L) 7 22 7.5 8 16.6 14.6 9 3 8 9.8 MXQ-CS8(L)-X11 M3 x 8 M3 x 10 M6 x 1 15 28 MTS F MXQ-CS8(L)-X12 25 38 G E MXQ-CS12(L) 5 22 MY C MXQ12(L) M8 x 1 M4 x 12 M4 x 12 MXQ-CS12(L)-X11 9.5 29 11 12 20.5 18.5 14 4 11 13 15 32 MXQ-CS12(L)-X12 25 42 CY Table mounting section MXQ-CS16(L) 5 23 MXQ16(L) Q M10 x 1 MXQ-CS16(L)-X11 M5 x 16 M5 x 16 11
Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.
VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5