Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

Digital Gap Checker

ExamplePage 12 Construction DiagramPage 13, 14 Parts ListPage 15, 16 DimensionsPage 17 to 20 Error Indication Page 21 Relationship between Supply Pressure and Display Page 21 6 Digital Gap Checker Without Control Unit ISA3 Series RoHS 3-Color Display How to Order G C N M 2 ISA3 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm Piping specifications Supply side Detection

Air Pilot Operated Series NVSA

NVSA 3135 NVSA 3145 .g!

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

Air Fittings Fitting Series For Special Environment

Applicable fitting size d M Weight (g) A Effective orifice(mm 2) L1 D 8 KRR06-08 3.9 6 5.7 16.8 39 19 18.5 10 KRR06-10 5.5 4.4 KRR08-10 10 19.2 41.5 20.5 18.5 43 20 20 8 18.0 KRR08-12 12 6.1 36 KRR10-12 10 12 32.8 23.3 44 23 Note: Fitting cover ordered separately. Bulkhead union: KRE Inch e l b a c i l p p A . D .

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10

CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

VNB

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

PSxx-OMV0003CN

, (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

0.01

connector EXH port EXH port End plate L End plate L End plate R ZSE40 ISE40 3 0 3 0 3 0 ZSE10 ISE10 92 21 92 21 P P P T T T U U U E E E L L L S S S L L L 5.5 81 5.5 81 6 9 6 9 6 9 Setting dial ISE70 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 ZSE80 ISE80 12 12 12 Bracket ZSE ISE Plug Rc, NPT, G 1/8 SUP port 24 Pressure gauge L3 6.5 ZSP 24 36 36 PS n Stations 1 Left

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Values at the initial period) VFN Base mounted JIS Symbol Solenoid Specifications Option Grommet (G), Plug connector (L), Plug connector (M), DIN terminal (D) 100, 200, 24 , 48 , 110 , 220 Electrical entry DC AC 50/60 Hz Coil rated voltage (V) 24, 6 , 12 , 48 Allowable voltage fluctuation (%) 15 to +10% of rated voltage Caution Coil insulation type Class E or equivalent (120C) (2) Temperature

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Inch-size One-touch fittings and NPT/NPTF/G threads are available.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

D L KFP-04 KFP-06 KFP-08 KFP-10 KFP-12 4 6 8 10 12 6.5 8.5 10.4 13 15 12 12 12 13.5 14 99 Series KF Insert Fittings Swivel elbow: KFV Applicable tube (mm) A Effective orifice (mm 2) H1 (Hex.) H2 (Hex.) H3 (Hex.) H4 (Hex.) Weight (g) Thread R(PT) Part No. L1 L2 L3 L4 M d O.D.

Series H, DL, L, LL Self-align Fittings

Weight (g) 5 7 8 13 14 Part No. Part No. Applicable Tube O.D. Applicable Tube O.D. Weight (g) Part No. Part No. L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

Compressed Air Preparation Filter

AM20 AM30 AM40 12 16 14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure

Compact Manifold Regulator

Stations 1 2 3 4 5 6 7 8 9 M SMC 56 28 AXT100-DR-8 110.5 AXT100-DR-10 135.5 SMC SMC K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 11.5 8 AXT100-DR-14 185.5 12 12 3 AXT100-DR-16 210.5 AXT100-DR-19 248 AXT100-DR-21 273 AXT100-DR-23 298 81 16 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 OUT IN OUT IN ARM11BC2-08 Knob position: Bottom L2 L2-10.5 L1=(28 x n)+36 18 28 52.5 39 28 12 12 5.3 3

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)