RSH/RS1H Stroke length tolerance Flange Mounting CE2 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Weight Rod end configuration 2020 0.41
Stroke length tolerance Flange Mounting CE2 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Rod end configuration Weight 2020 0.41
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8" (19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
VQD 24V 12V 100V 200V 110V 220V 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 To remove manifold from DIN rail: 1) Loosen the clamp screw on the A side of both ends of the manifold. 2) Lift the A side of the manifold off the DIN rail and slide it in the direction of the B side.
The electrical entry port {VQ1000: G 1/2, VQ2000: G 3/4} permits connection of conduit fittings.
20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F D-F7W D-J79W D-F7BAL D-F79F D-F9BAL 6 6 6 6.5 Number of auto switch D-F7LF D-A9 D-F9 D-A79W 7.5 7.5 8 D-F7LF 7.5 D-F9, F9V D-F9W, F9WV D-F9BAL 1 pc. 2 pcs. 20 20 20 20 25 25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines including hystereses and are not guaranteed
MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14
Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female
Bore size: 16, 20 E S 4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC
LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885
Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 6 Standard (shock absorber RB series) 10, 15 20 25 32, 40 Magnetic holding force Refer to page 1517 for specifications.
Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.
Face seal fittings: R, NPT, G 1. Tighten fittings with sealant using the proper tightening torques in the table below. 2. Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2.
For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)
style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.
Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100
Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.
300.025 250.03 12.5 11 through P P Q M8 x 1.25 150.03 180.03 R28 Q M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 NAAMS code ACA007M ACA008M ACA009M ACA010M ACA011M ACA012M NAAMS code ACA019M ACA020M ACA021M ACA022M ACA023M ACA024M A B C D E F G H I A B C D E F G H I Part no.