4/5 Port Solenoid Valve Series SYJ3000/5000/7000

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

MXS Series Air Slide Table

R* P FR* FP Functional option Adjuster option Without option With buffer With end lock Axial piping With buffer, end lock With buffer, axial piping F R P FR FP Note 1 Note 1 Note 1 AS AT X X X X Note 1 A X X X X End lock option is not available for MXS6.

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

-fl Seies

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

Shock Absorbers and Rate Controls

4 f f i .

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5

CLS

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-9-6 7 Model Selection Series CLS Selection Graph Graph (5) Graph (2) 0.3 MPa ) P < 0.4 MPa 0.3 MPa ) P < 0.4 MPa 4000 4000 3000 3000 250 2000 2000 200 Load weight: m (kg) Load weight: m (kg) 180 CL 1000 1000 160 700 800 900 700 800 900 250 140 CL1 600 600 125 200 500 500 180 MLGC 400 400 160 300 300 140 CNG 125 200 200 MNB

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

PF-OMN0009_C

PF3W520 [ M P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm

Electric Actuator with Integrated Guide

P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

MGG

Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

M16 x 1.5 21 34f8 22 5 Hydraulic Cylinder: 7MPa Series CHN Axial foot type: CHNL H GA2 GB2 I Rc P Rc P Rc P K A F GA1 GB1 T V Cushion valve Effective thread H2 width across flats B2 Cushion valve Cushion valve H1 width across flats B1 MM D 4-LD W LH LT Width across flats E GB3 GA3 Air release Air release NA NB S + Stroke X X LS + Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range