HEC-OM-S008

0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :

reduces flow setting time

, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41 8 17.9 43.3 21 67 18.5 57 29.5 3/8" 23 20.9 46.5 35.2 40.2 41.5 19 3/8 AS321F-03-07 AS321F-03-10 27.8 43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5/16" 3/8 AS321F-03-11 AS421F

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

CRQ2

P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

Compact Type

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 2003 D-DN P-120 (DN) Printed in Japan.

IDU/IDF

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 2000 D-SMC.L.A. P-80 (YG)

Process Pump

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OY printing OY 7150SZ Printed in Japan. D-DN

PSE200

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing August, 2001 D-SMC.L.A. P-90 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

IR1000/2000/3000

August, 1998 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

ZSE5/ISE5

-$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

MLU

: (800) 258-9200-www.stevenengineering.com KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB

High Speed Pilot Operated

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output Max. 30 V, 80 mA Residual voltage 1 V or less 1.5 MPa Withstand pressure 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at no load) Current consumption

CLK1

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (YG)

CU

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing September, 2001 D-SMC.L.A. P-80 (JT) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

VHS20/30/40/50

SUP SUP IN OUT Applicable air preparation equipment Spacer with bracket P/N Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 Interface P/N AC20 AC25, AC30 AC40 AC40-06 AC50, AC60 Note) Y200 Y300 Y400 Y500 Y600 Y200T Y300T Y400T Y500T Y600T Spacer with bracket Note) Although connection to AC60 is possible, the flow rate may decrease due to the mounting position. 5-8-20 3 Series

Plate Cylinder with Lock Series MLU

GC1 MM1 KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

G SMC H F P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH.