Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: Y (Low Wattage 2WDC), CE Compliant: Q (CE Compliant)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Y (Low Wattage 2WDC), CE Compliant: Q (CE Compliant)

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Low Wattage 2WDC, CE Compliant: CE Compliant

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 3/4, Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Low Wattage 2WDC, CE Compliant: CE Compliant

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free / Low Current, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: G, Port Size: 1, Pressure Rating(MPa): -0.1

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

PF2D

2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

IDX-OM-W093

ADH-E400 ADH4000-04 N.O.

•

N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

CUJ

3 w e q !1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Parts list Replacement parts: Seal kits (double acting) Contents Note No. Description Material Kit no. Bore size 1 Hard anodized Aluminum alloy 4 CUJB4-PS Cylinder tube 2 Above numbers 11, 12, 13 and an exclusive grease pack.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

IDX-OM-W011

6 IDF11E-10 ILS SYMBOL WIRE COLOR PTC (WH) (BK) 1 2 (BK) AC100/100,110V (50/60Hz) 3 (BU) M (BK) Black 4 C01 S (WH) White CM 4 2 (GR) (GR) Gray PC OLR (SY) C (SY) Sky Blue (SY) C 1 3 (RD) Red FM PRS (RD) (BU) Blue (BK) (G/Y) / Green/Yellow P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(Select wiring bottom entry when the semi-standard Y is chosen simultaneously.) Note 4) The only difference from the standard specifications is the pressure regulator spring. It does not restrict the setting of 0.2 MPa/0.6 MPa or more.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(Select wiring bottom entry when the semi-standard Y is chosen simultaneously.) Note 4) The only difference from the standard specifications is the pressure regulator spring. It does not restrict the setting of 0.2 MPa/0.6 MPa or more.

This is a legacy product, and replaced byVFR5310-5DZ-04F-Q, Type of actuationModelPort sizeFlow characteristics (1)Max. (2)operating cycle(Hz)Response (3) time (ms)(4)(kg) Plug-inNon plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCv3 positionClosed centerVFR530VFR5313/8150.384.1160.314.3380 or less1.87(1.82)

This is a legacy product, and replaced byVT317-5DZ-02F-Q

This is a legacy product, and replaced byVFS4210-5DZ-Q

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

This is a legacy product, and replaced byVFS5110-5DZ-Q