Size: 2 [ø15(ø11)], Valve Type: 3 [CO (Operating Pressure 1MPa)], Sealant: C (EPR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 10A (3/8)

Size: 2 [ø15(ø11)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: C (EPR Seal), Body Material: Standard (Bronze Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 10A (3/8)

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: A (NBR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 10A (3/8)

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 10A (3/8)

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

MY1

MY1B32-500 Average operating speed a 300mm/s Mounting orientation .. Horizontal mounting 1. Horizontal mounting 2. Wall mounting P. 58 z y x y x z W: Work piece (2kg) 3. Ceiling mounting P. 42 4.

SY

Without indicator light/ surge voltage suppressor Without indicator light/ surge voltage suppressor Type of actuation With indicator light/ surge voltage suppressor With indicator light/ surge voltage suppressor R, U types S, Z types R, U types S, Z types 19 or less 26 or less 2 position single 18 or less 18 or less 22 or less 2 position double 32 or less 32 or less 38 or less 3 position

CJ2

+ Stroke 5 Z + Stroke (mm) Data Stroke 5 to 15 16 to 30 31 to 45 46 to 60 S 30.5 39.5 43.5 57.5 Z 63.5 72.5 76.5 90.5 Note) 1.

LJ1H

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm/s or less !

MY1

Piston speed (mm/s) Piston speed (mm/s) 1.

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Smooth Cylinder/Low Speed Cylinder

on head cover: Axial location (R) S + Stroke Z + Stroke For details of the mounting nut, refer to page 1250.

Table of Contents

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

5

+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.