AFF

6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253

0.5

Power supply cable IZS41 IZF CP HS Automatic cleaning unit 21 Power supply cable Nil Power supply cable (3 m) Z Power supply cable (10 m) Model 21 For IZF21 31 For IZF31 X13 02 IZS41 CP Power supply cable length Cleaning arm (for automatic cleaning unit) 01 Total length: 1 m 02 Total length: 2 m IZF M3 21 Model 19 Total length: 19 m 20 Total length: 20 m 21 For IZF21 31 For IZF31 : Available

Micro-Mist Separator with Prefilter Series AMH

10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110

Digital Pressure Sensor

GS 5 9 8 5 PS 36 3 22 22 ISA 3.2 ZSE1 ISE1 ZSE2 ISE2 1 M5 PT 40 ZSP ISl SET ALM. 20 kgf K P M b ZSM + _ PFl UNIT P.SET IFl 3.6-4

51

(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.

One-touch Fittings

X 10 Y 12 1/4 KQ2H12-02GS 19 17.2 18.2 28.7 24 17 58.3 46.1 9 24.3 3/8 KQ2H12-03GS 19 17.2 18.2 25.9 20.8 17 58.3 46.1 9 25.2 1/2 KQ2H12-04GS 22 22 18.2 22.3 15.9 17 58.3 58.3 9 37.7 Applicable tubing O.D.: 4, 6 16 3/8 KQ2H16-03GS 24 22 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04GS 24 22 23.6 32.1 25.7 20.6 113 67 13 44.6 *1: D is the body diameter. *2: Reference dimensions after installation

Compact Manifold Regulator

22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

Compact Cylinder with Air Cushion

22 42 14 30 12 14 16 30 12 14 36 41.6 Y-G04 10 18 32, 40 42 0.3 0.5 +0.5 +0.3 +0.070 0 14 IY-G05 22 50, 63 I-G05 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32 100 I-G10 M26 x 1.5

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

RQ

22 42 14 30 12 14 16 30 12 14 36 41.6 10 18 42 0.3 0.5 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 IY-G05 22 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 IY-G10 32 M26 x 1.5 M26

Digital Flow Switches, Series PF2A, Series PF2W

Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Set flow rate range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Minimum setting unit Note 1) 0.05l/min 0.1l/min 0.5l/min 1l/min Accumulated pulse flow rate exchange 0.05l/pulse 0.1l/pulse 0.5l/pulse

PSxx-OMH0002CN

43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"(

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

35 40 70 29 16 34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting holes A port B port The dimensions above show pressurization to B port

Rotary Actuator

Corresponding parts 50 P694020-22 Di, !0, !1, !4, @2 are included as a set. 63 P694030-22 80 P694040-22 100 P694050-22 Note) When ordering replacement parts, write 1 for one set of the parts per actuator. A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

35 40 70 29 16 34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting holes A port B port The dimensions above show pressurization to B port

CLQ

L d l D m d H B C IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 8 for axis 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 24 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Simple Joint

MTS

22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5 102.5 102.5 102.5 28 28 32.5 52.5 98.5

NCA1

See Pg 22 for auto switch options when using composite or stainless steel tube.