CXS

2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0

CXS

counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

11 6 stations 6 stations Fujitsu Limited (+) () () (+) 12 12 Japan Aviation Electronics Industry, Ltd. (+) () () (+) 13 13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

A port B port (mm) A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 0 0.043 0.004 0.012 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0 0.043 0.004 0.012 6 14 42 34.5 10 20 M5 x 0.8 1.5 17 7 10 0.5 36 M4 x 0.7 4.5 M4

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Rotary Actuator/Vane Type

, 12 V S99V S99 V V v v IC circuit 3-wire (PNP) S9PV S9P V V v v 2-wire 12 V T99V T99 V V v v Solid state auto switch Oilproof heavy-duty cord Yes For 10, 15 Relay, PLC 24 V Grommet 5 V, 12 V 5 V, 12 V, 24 V 90 Vinyl parallel cord V V V IC circuit 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V 90A Oilproof heavy-duty cord V V V Reed auto switch No 2-wire Yes 97 Vinyl parallel cord

S070

x 0.5 2 (OUT) port VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 8.8, L2 = n x 7.2 + 14.8, n: Stations (maximum 20 stations) n L 12 95.2 101.2 19 145.6 151.6 2 23.2 29.2 3 30.4 36.4 4 37.6 43.6 5 44.8 50.8 6 52 58 7 59.2 65.2 8 66.4 72.4 9 73.6 79.6 10 80.8 86.8 11 88 94 13 102.4 108.4 14 109.6 115.6 15 116.8 122.8 16 124 130 17 131.2 137.2 18 138.4 144.4 20 152.8 158.8 L1 L2 4-11-11 12

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

TABLE OF CONTENTS

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

IDX-OM-W026

M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

IDX-OM-W023

R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i

Auto Switch Guide

CS1 Main circuit of switch OUT Black C76 Weight C85 DC () Blue (g) C95 D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 CP95 Lead wire length (m) 3 54 54 54 DC (+) Brown NCM 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions NCA OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DDC () Blue -X 3.4 2.5 D-Y7BW, D-Y7BWV SMC

MK

Auto switch model 12 16 20 25 32 40 50 63 CC D-A7/A80 D-A7H/A80H D-A73C/A80C 12 12 12 11 10 12 RB Applicable bore size (mm) Electrical entry (Fetching direction) Type Model Features D-A79W D-A9/A9V 13 13 13 14 14 16 6 7.5 9.5 9.5 9.5 11.5 J D-A80 D-A80H D-A80C D-A90 D-A90V Grommet (Perpendicular) Grommet (In-line) Connector (Perpendicular) Grommet (In-line) Grommet (Perpendicular) D-F7

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x

New

6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.