VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

o

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

S070

End Plate Assembly > q U end plate assembly no.

5 Port Air Operated Valve

e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

ZQ

Actuation Warning 1 Normally closed q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the workpiece may not be released.)

SMC Pneumatic Clean Series

R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

Low Profile Guide Type

+ Stroke) Q + Stroke CY1F 4 x MM thread depth ML (LL) LA 6 x YA recessed area Note 2) XAH7 PA Adjustment bolt Max. approx.

10

3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

reduces flow setting time

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with One-touch Fitting

0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Bag Filter

Flow rate (L/min) 50 A Bag Filter FGF Series Construction FGF1 FGF3-40 FGF5-60 Air release Nut Air release valve Pin q FGD Davit for cover Spring washer t u !0 y u o q Air release Fluid release FGE Retainer Handle FGG Guide slit Center bolt Bracket for V-band Air release valve FGA !1 t Inlet i FGC i Inlet Drain port FGF FGF r Pressure gauge !

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

D 1 5 CE-compliant Nil None Q CE-compliant Clean series Manifold type 2 Body ported 5 Base mounted Valve stations 02 2 stations Port size Nil Body ported M5 thread M5 Base mounted M5 thread C4 Base mounted 4 One-touch fitting 20 20 stations (Maximum) How to Order Valve [Option] 10 V Q D 1 1 5 1 5 L M5 Clean series Body type 3 Body ported 5 Base mounted Valve option Nil Standard

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/Low Friction Series MBlQ 32, 40, 50, 63, 80, 100 How to Order MB L Q F 32 50 Standard MDB L F 32 50 Q A53 With auto switch Built-in magnet Number of auto switches S 3 n 2 1 3 n Mounting Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size 32mm 40mm 50mm 63mm 80mm 100mm 32 40 50 63 80 100 Auto switch/Tie

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm