SMC Corporation of America
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Search Results "VQ4000-PW-03-Q"

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Therefore, if an air compressor has a small air delivery, the pressure may not be sufficient. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2004 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing IU printing IU 50DN

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

Description Material Body Zinc alloy die-casted q Precise pilot valve Aluminum alloy die-casted w Upper diaphragm NBR/FKM e Spring Stainless steel r Valve guide Stainless steel t Valve NBR/FKM y Retainer Polyacetal u Component Parts Lower diaphragm NBR/FKM i No.

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Pad side q u Description Component Parts Material Surface treatment No.

2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Needle guide Seat ring No.