Compact

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical

Step Motor Driver （ Pulse input type ）

Brown 2 A B-1 Red 1 A A-1 Cable lengthL Orange 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 3 3m Shield Cable color Terminal no. 5 5m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 3 S Standard cable signal Terminal no.

High performance type Step Motor Controller (Servo/24 VDC)

6 B A-2 B-3 A-3 Yellow 5 3m 3 Green 3 Blue 4 5m 5 Shield (3) Vcc B-4 Brown 12 Actuator cable type GND A-4 Black 13 A B-5 Red 7 Nil Robot cable A A-5 Black 6 B B-6 Orange 9 S Standard cable B A-6 Black 8 3 (4) B-1 A-1 B-3 A-3 Red 4 Black 5 Brown 1 Blue 2 Electric actuator side Controller side (8) A1 (1) B1 14.2 1 (2) 2 10.2 (17.7) 14 18 L A6 B6 5 6 A1 B1 A3 B3 1 2 (5.7) (4) 15 16 11 30.7

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Step Motor Controller (Servo / 24 VDC)

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 A 10m *1) Shield B 15m *1) Cable color Terminal no. Vcc B-4 Brown 12 C 20m *1) GND A-4 Black 13 A B-5 Red 7 *1) produced upon receipt of order A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can be B A-6 Black 8 selected. 3 signal Terminal no.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

CEx-OMB0060

Outside Dimensions 4 Chapter 3: Functions and Terminology 5 Chapter 4: Specifications 8 Chapter 5: Description of Each Part 10 Chapter 6: Wiring 6-1. Terminal block arrangement 11 6-2. Wiring of sensor input part 11 6-3. Wiring of control signal input part 12 6-4. Wiring of output part 12 6-5. Wiring of RS-232C 12 6-6.

Servo Motor Controller (24 VDC)

Product Outline.6 2.1 Product features.6 2.2 How to Order.7 2.3 Product configuration .8 2.4 Start up Procedures .9 (1) Confirmation of the package content .9 (2) Installation.9 (3) Wiring and connection.9 (4) Power ON alarm (error) .10 (5) Operation pattern setting.10 (6) Trial run (actuator adjustment).10 3.

ZQ-OM01301

Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.

100

6 !5 !1 !4 Component Parts No.

IP8101 Series

No.DIG-31900-OM002 45 Procedure LCD display 5 Hold down Down or Up button ( ) to set remaining 10 inputs as in clause 4. or 6 Hold down the mode button ( ) for 1sec. or longer.

DOC1023125

225 401 to 500 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220

Flow sensor

M-5AN-6 -16No.

IP8001 Series

As setting proportional gain (P constant) in clause 3 above, set integral time (I constant) within the range of 0.000 to 9.999 with (812), and set differential time (D constant) within the range of 0.000 to 9.999 with (813). or 5 Hold down the mode button ( ) for 1sec. or longer to return to parameter change mode. 6 Press the UP or DOWN button ( ) to select reverse direction (ruS).

Flow Control Equipment

Retainer prevents accidental loss of needle Optional: Hexagonal lock nut, Nickel plated option Air Flow/Effective Area AS1001F AS3001F AS2051F AS4001F AS2001F Model 12 4 10, 12 6 8 6 10 8 Metric size 6 3.2, 4, 6 Inch size Applicable tube O.D. 5/32" 3/16" 1/4, 5/16 5/16 3/8" 3/8" 1/2" 1/4 3/16", 1/4" Number of needle rotations has been increased (8 to 10 turns) 1/8", 5/32" Air flow (l/min(

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable color Signal Nil A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 S Standard cable Cable color Connector D terminal no. Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

IZx-OMR0035

Replacement of Cleaning Arm . 22 4-5. Replacement of Emitter Cartridge . 23 4-6. Alarm Function . 23 4-7. Offset Voltage Performance Maintaining Function . 25 4-7-1. Ion Balance Sensor . 25 4-7-2. Averaging Function . 25 4-8. Louver (Option). 26 49. Filter (Option) . 27 5. Performance . 28 5 -1. Basic Performance . 28 6. Dimensions . 30 7. Specifications . 34 8.

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

PSxx-OMM0006CN

/ / 0 <> [F 5] -36No.PS-OMM0006CN-E [F 5] / 5 ms ooo1 C_5 10 ms o.r1 () () ( ) OUT2 C_5C_5 C_5() EEPROM -105.0105.0 kPa -210210 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -37No.PS-OMM0006CN-E [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -38No.PS-OMM0006CN-E [F11] <> [F11] [F11] 1000 100 , [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]

Digital Pressure Switch

D ZS-24-D ZS-35-C Panel mount adapter E ZS-35-D ZS-35-F Panel mount adapter + Front protective cover F ZS-35-G Accessories 1 / Part numbers Part number Option 1 ZS-24-A Bracket A with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-24-B Bracket B with 2 mounting screws M4 x 5 L ZS-24-D Bracket D with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-35-C Panel mount adapter (piping specification