High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 417 C XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric

Solid State Auto Switches

VDC (10 to 28 VDC) Load current 40 mA or less 1.5 V or less (0.8 V or less at 10 mA load current) 80 mA or less 5 to 40 mA Internal voltage drop 0.8 V or less 4 V or less 100 A or less at 24 VDC Leakage current 0.8 mA or less at 24 VDC Indicator light Red LED illuminates when turned ON.

Auto Switch Guide

VDC) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) 28 VDC or less Load voltage Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 40 mA 80 mA or less 40 mA or less Load current 0.8 V or less 1.5 V or less (0.8 V or less at 10 mA

Integrated Controller

10 80 70 60 50 40 30 20 10 0 100 200 300 400 500 600 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

circuit 4-wire (NPN) 5 V, 12 V Solid state switches marked with are produced upon receipt of order.

SV

Core wire colors Brown: 0 V (Solenoid valve power supply) 1 2 3 4 5 Brown: 0 V (Solenoid valve power supply) 1 2 3 4 5 White: 24 VDC +10%/5% (Solenoid valve power supply) White: 24 VDC +10%/5% (Solenoid valve power supply) Blue: 0 V (Input and control power supply) Blue: 0 V (Input and control power supply) Black: 24 VDC 10% (Input and control power supply) Black: 24 VDC 10% (Input and control

smcmaintenancepartslist

10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 65 x L250 65 x L250 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

valve mixed mounting style 3 port valve NPTF T SY 5 1 3 Y 5 10 SY 5 2 2 Y 0 5 10 5 port valve A, B port size Clean series Body ported Thread piping Pilot type Electrical entry Series Nil Internal pilot R External pilot Symbol Port size Applicable series 01 02 03 Y: With connector 1 8 10-SY5000 10-SY7000 10-SY9000 5 10-SY5000 7 10-SY7000 9 10-SY9000 1 8 3 8 R : Base mounted type only One-touch

Cylinder with Lock

) Grommet Grommet 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 V V

Slider Type Ball Screw Drive/11-LEFS Series

[W] Note 10) 2.9 5 5 5 Rated voltage [V] 24 VDC 10% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders.

MY1

function Wiring (Output) Type DC AC 0.5 (Nil) 3 (L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Function Function Pin no. 24 V 1 COM+ 1 COM+ 24 V COM COM 0 V 2 2 0 V Pulse signal 3 NP+ 3 NP+ Pulse signal NP NP Pulse signal 4 4 Pulse signal Note 1) Note 1) Pulse signal 5 PP+ 5 PP+ Pulse signal PP PP Pulse signal 6 6 Pulse signal Input 7 SETUP 7 SETUP Input Input 8 RESET 8 RESET Input Input 9 SVON 9 SVON Input Input 10 CLR 10 CLR Input Input 11 TL 11 TL Input Load Load Output 12 TLOUT

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 to 5 V or 0 to 10 V can be selected.

MG

25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load weight m (kg) Load weight m (kg) 50 40 40 32 32 10 10 25 25 5 5 20 20 16 16 1 1 0.5 50 100 200 0.5 50 100 200 10 10 Eccentric distance l(

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0

Auto Switch Guide

VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 1.5 V or less (0.8 V or less at 10 mA load current) 80 mA or less 5 to 40 mA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Internal voltage drop 0.8 V or less 4 V or less Leakage current 100 A or less

Speed Controller with Indicator

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V R NPT Note 1) Sealant AS3ll1FSl-l02 1/4 V V V

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil(Example) Y59B 3 m L (Example) Y59BL 5 m Z (Example) Y59BZ Z76 5 V IC circuit Reed switch Solid state switch Yes 100 V Z73 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less No 5 V, 12 V Z80 IC circuit Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7P 3-wire (PNP) Y59B 2-wire 12 V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Y7NW Diagnostic indication (2-color

Refrigerated Air Dryers

, IDF6E-10 IDF8E-10, IDF11E-10, IDF15E1-10 10 A C 100 V type E A IDU3E-10, IDU4E-10, IDU6E-10 IDU8E-10, IDU11E-10, IDU15E1-10 F Power cable outlet (17) (Electric wire diameter 9 to 11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E