Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: None, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: None, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2), Thread: T (NPTF), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: None, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: N (Indicator Light), Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2), Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2), Thread: T (NPTF), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2), Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

CEx-OMQ0013

" PRG "8" " " PRG 8 STEP 0 2 WRITE " End 42 End0.0 PRG 8 STEP 1 " " " " 1 LEFT PRG 8 STEP 1 " DOWN 8 " " " 1 LEFT DOWN 6 1 WRITE 2 PRG 8 STEP 2 " 5 UP 5 " " " PRG 8 STEP 2 2 LEFT " " UP 3 " " 1 WRITE PRG 8 STEP 3 8 1 END " " " " " " PRG 8 STEP 1 8 " 43 9-2-2 PROGRAM PRG1UPDOWN " " " PRG 1 STEP 1 " 1 READ STEP1 UPDOWN No., 9-3 OFF 9-3-1 N0.1 OFF 0.0 ON

A_HEC-OM-J017

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 + 2 2 2 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

LECP6_C

+ + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1 LECP6 2 DIN LECP6D 13 - 3.4. 1 DIN 2 LECP6DINLECP6DDIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm () 0mm (LE)10mm LEH 25 30mm 60mm 30mm 50mm DIN ) 15 - 4.

LECA6_C

7 + + + + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1LECA6 2DIN LECA6D 13 - 3.4. 1 DIN 2 LECA6 DINLECA6D DIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm 0mm (LE)10mm 25 LEH () 30mm 60mm 30mm 50mm DIN ) 15 - 4.

PSxx-OMU0008CN

Rc1/8 M50.8 5 G1/4 A2L B2L URJ1/4 TSJ1/4 -82No.PS-OMU0008CN-D A -83No.PS-OMU0008CN-D C -84No.PS-OMU0008CN-D () 43.602 0.5~7 ()+ 43.602 0.5~7 -85No.PS-OMU0008CN-D () 1~5 -86No.PS-OMU0008CN-D ()+ 1~5 -87No.PS-OMU0008CN-D () 2 (n ) <> 31n +3.5n -1 -88No.PS-OMU0008CN-D <> -89No.PS-OMU0008CN-D () 2 (n ) <> 36n +4n -1 -90No.PS-OMU0008CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

PS-OMH0005CN

2 / / / 2 n_n / LoC() 4 UnL LoC 4 LoC UnL 5F.S.(2.5F.S.) 1 12341 2 2 2 -27No.PS-OMH0005CN-D (2030 ) -28No.PS-OMH0005CN-D PSE200 ( ) 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 OFF 6 -29No.PS-OMH0005CN-D 7 Yes No 8 8 9 10 11 12 13 14 15 16 -30No.PS-OMH0005CN-D No.

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

PFxx-OMJ0005CN

() Rc Rc NPT 1/8 NPT 1/4 G G 6 1/4 (5/32") (5/16") 1/8 1/4 1/8 1/4 95 g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--