High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

0.4

(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

MQQ

C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60

MQQ

OA effective depth RA 2 x 4-OB Counterbore depth RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 28 H thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5

Environment

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.

Series SV

SV1100-5FU 4 sets (single solenoid part no.) PWR COM SV1200-5FU 2 sets (double solenoid part no.) D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Modular Type Filter Regulator Series AW

Note 4) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

RZQ

RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB RR RH T W E FA Z 32 100.5 82.5 14 22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5

10

D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 CJ1 D-A9l D-A9lV D-P3DWA D-P4DW CJP CJ2 Bore size A B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

VM

134(159) VR 97(122) VH 125 94 VHS M40 x 1.5 8 (10) 1.5 M8 x 1.25 106(113) M33 x 1.5 8 45 1.5 M8 x 1.25 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc 1/4 VH33-02/03 (Bottom ported) 2 (A) 44 Panel cut dimension 2-A +0.3 0 1 (P) 3 (R) C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)