CE

34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

CE

34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Remote connection system status Specification Str Frunzei 29, Sector 2, Bucharest, Romania W-MS SLOVAKIA (421) 41 321321 1 Remote (EX600-WSV#) can be used regardless of the communication specification of the base. (3) Set the "base" system.

EXW1-NT1_eng

Poloneza 89, 02-826 Warszawa, Poland PORTUGAL (351) 21 472 45 00 Alameda dos Moinhos, 9G, 2720-381 Alfragide Portugal ROMANIA (40) 213205111 Str Frunzei 29, Sector 2, Bucharest, Romania SLOVAKIA (421) 41 321321 1 Fantransk 1223, 01301 Teplika nad Vhom, Slovakia SLOVENIA (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje, Slovenia SPAIN (34) 945 184 100 Zuazobidea 14, 01015 Vitoria, Spain SWEDEN

DOC1001322

usage time of dustproof filter .5-26 5.4.6 Software version screen .5-27 5.4.7 Setting screen .5-27 Temperature rise/drop alarm (AL10/AL11).5-28 TEMP READY alarm (AL12) of TEMP READY function .5-30 Offset (TEMP OFFSET) function .5-33 Pump operation mode .5-36 Discharge pressure alarm (AL18/AL19/AL20) .5-37 Electric conductivity and alarm setting (AL28) .5-39 5.4.8 Function setting screen .5-41

HRX-OM-M005

Figure 5-41 Serial Communication Setting Screen 2 [Tips] The setting has not taken effect while the box is flashing. 2. Touch the [Enter] key. The MESSAGE screen is displayed. Figure 5-42 Serial Communication Setting Screen 2 3. Touch the [YES] key. The setting takes effect.

Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

Title not found

41"ry19e: 4-position dual 3-port valves for \ \ ..;'r..:.. independent control of ' .:1-.i/-9-.A & B ports Availabe conf igurations [N.C./N.C ]. I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

DOC1020530

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.

EXxx-OMA1018_Eng

Str Frunzei 29, Sector 2, Bucharest, Romania Caution SLOVAKIA (421) 41 321321 1 When handling the unit or assembling/replacing units: Do not touch the sharp metal parts of the connector or plug for connecting units. Take care not to hit your hand when disassembling the unit. The connecting portions of the unit are firmly joined with seals.

SYJ300-OMU0003

AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V) 220VN SY100-82-2-04 AC DC LED R NL R: 12 No.SYJ300-OMU0003 SYJ Series Assy M8 Ass'y M8IP65() Ass'yV100-49-1NECA4202 IEC60947

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

60

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 ) ) ) ) ) ) ) ) Options Symbol Description ) ) Nil 1 B With bracket Built-in silencer (EXH port) Handle / Bonnet material Symbol Material S A B Flame resistant PBT 3 Aluminum Built-in silencer A spacer or spacer with bracket is required if the valve is combined

-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35 .006 White / Red -- F-2815-051-B80-NOR-W - $1.40 F-2815-051-B85-NOR-W - $1.40

-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35 .006 White / Red -- F-2815-051-B80-NOR-W - $1.40 F-2815-051-B85-NOR-W - $1.40

-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35 .006 White / Red -- F-2815-051-B80-NOR-W - $1.40 F-2815-051-B85-NOR-W - $1.40

-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35 .006 White / Red -- F-2815-051-B80-NOR-W - $1.40 F-2815-051-B85-NOR-W - $1.40

-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35 .006 White / Red -- F-2815-051-B80-NOR-W - $1.40 F-2815-051-B85-NOR-W - $1.40

-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35 .006 White / Red -- F-2815-051-B80-NOR-W - $1.40 F-2815-051-B85-NOR-W - $1.40