Table of Contents

How to Order . 60 61 62 63 64 66 67 69 69 70 71 72 74 75 76 76 77 78 78 80 81 82 84 88 89 90 91 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 92 93 94 94 95 95 95 95 96 96 96 96 96 97 97 98 98 99 99 99 100 100 102 103 103 104 106 106 107 109 111 111 Caution .

CQM

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

CXT

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71

CNS

There may be the case it will vary substantially depending on an D-Z7/Z8 D-Y5/Y6 D-Y7(W) D-Y7(W)V Common for each auto switch Bore size (mm) D-Y7BA A B Hs Ht Hs Ht 125 69.5 71 69.5 1.5 1.5 69 140 76 77 76 1.5 1.5 76 160 85 88.5 85 1.5 1.5 85 9-8-21 22 Series CNS Minimum Stroke for Auto Switch Mounting n: Quantity Center trunnion No. of auto switches mounted 140 160 Auto switch model Mounting

MLU

87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX 3.2 4.5 4.5 5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT CL1 29 37 46 57 56 71

RLQ

Retraction locking LOCK Unlocks when pressurized PL unlocking port 22.5 13.5 PL Pc Port thread type Rc NPT G 1/8 1/8 M5 x 0.8 Dust cover (Manual unlocking unit) Rod end male thread M14 x 1.5 8 20.5 23.5 28.5 Rod end nut 9-12-10 11 Series RLQ Compact Cylinder with Air Cushion and Lock Dimensions: 32 (Emergency stop) Foot style: RLQL32 37 + Stroke 32 17 Special cap bolt 54.2 60.2 30 57 4 57 71

MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181

MXF

Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201 141 121 101 80 60 40 16 8 IN 151 106 91 76 60 45 30 Made to Order Specifications (For details, refer to page 8-31-1.) 220 188 157 126 94 63 OUT 314 20 10 165 142 118 94 71

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B C L Included parts Foot Body mounting bolt Foot: LEY ll -lllL 25 32 63 LT LL Outward mounting LG LY LH LT X Y Y Y LX X X LS + Stroke LS1 LS + Stroke LZ A + Stroke 4 x LD Special cap bolt [mm] Foot Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 25 15 to 100 136.6 98.8 19.8 8.4 6.6 3.5 30 2.6 57 51.5 71 11.2 5.8 105 to 400 161.6 123.8 32 20 to 100 155.7 114 19.2 11.3 6.6 4

Clean Air Module

locked position 508 10 10 SFD 95 (Lever operating direction) Max. 132 Connection part Rc 3/8 (NPT 3/8) LLB LLB A Hand valve Valve closed position AD Air operated valve 3.5 GD Clean regulator With flow adjuster Pressure outlet port Rc 1/8 One-touch fitting 12 Digital flow switch PA pilot port Rc 1/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103 85 13.2 34.8 3 (41) 111 59 71

Precision Regulator

M6 x P0.5 5.5 M5 x P0.5 4.5 9.5 8.5 71 (17.7) 124 92 Bleed 52.5 63 Exhaust 46 Bleed OUT(2) SUP(1) 43 G OUT 2 SUP(1) OUT(2) 30 50 50 2 x Rc 1/8 9.5 60 35 EXH Pressure gauge port 43 2 x Rc 1/8 Pressure gauge port 35 2 x Rc 1/8 Port size 2 x Rc 1/4 Port size IR300-0 82 60 Mounting hole 12.5 2.3 48 Bracket (Option) Panel mounting hole Max.4 Pressure gauge (Option) Panel When mounting on a panel

90

. * Compared with the current IR1000/2000/3000 Up to approx. twice * IR-A IR-A Precision Regulator Reduced by 71 mm High flow rate [L/min (ANR)] IR Air Filter IR Current model Series 720 320 IR1000-A 1900 940 IR2000-A IRV (For IR2000-A) * Compared with the current IR1000/2000 VEX Reduced by up to approx. 27% * SRH [kg] Lightweight Current model SRP IR Current model Series 0.13 0.14 IR1000

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

Ionizer

Amplifier part Head part 2 x 3.4 2 x 3.4 3500 1500 16.6 13 SMC 9 58 25 4.8 10.2 69 15 4.8 23 8 87.5 78 0.5 11 13 6.5 7.8 8.8 8.8 0.5 10.2 10.2 13 60 7.7 7 6 1 50.5 14 Detection hole 10 61 2 x R3.3 Autobalance sensor [High-precision type]/IZS31-DG Amplifier part Head part 2 x 3.4 2 x 3.4 1500 3500 0.2 0.2 20 6.6 4.8 95 69 15 4.8 23 8 98 78 14.5 7.8 8.8 10.2 10.2 13 Detection part 60 7.7 12 71

25

x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB 0.5 0.5 IZD IZE 11 13 8.8 8.8 6.5 7.8 10.2 10.2 IZH 13 14 60 7 7.7 Detection hole 1 6 10.5 2 x R3.3 10 61 (7.5) Auto balance sensor [High accuracy type]/IZS31-DG 2 x 3.4 2 x 3.4 Amplifier Head 3500 1500 0.2 0.2 20 4.8 6.6 4.8 69 95 23 78 98 14.5 5 8.8 7.8 10.2 10.2 13 Sensor 60 7.7 71

1

8 length 3.5 M10 x 1.25 34.5 M22 x 1.5 32 12 15.5 M5 x 0.8 40 23.5 20.5 22 14 27 0 0.039 12 9.5 39 8 Width across flats 12 length 3.5 M14 x 1.5 42.5 M27 x 2 40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Bore size G S ZZ Bore size ZZ 20 5 37 (42.5) 67 (72.5) 20 52.5 (58) 25 5 37.5 (43) 70.5 (76) 25 53 (58.5) 32 5 38 (44) 71

15

A B C Foot: LEY ll -lllL 25 32 63 Included parts Foot Body mounting bolt Outward mounting LT LL LG LY LH LT Y X LS1 LX LZ Y X A + Stroke LS + Stroke X Y LS + Stroke 4 x LD Special cap bolt [mm] Foot Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 25 15 to 100 134.6 98.8 19.8 6.4 6.6 3.5 30 2.6 57 51.5 71 11.2 5.8 105 to 400 159.6 123.8 32 20 to 100 153.7 114 19.2 9.3 6.6 4 36

Integrated Controller

EQY H -L 16 25 32 LL LT LG LY LH LT X Y LS + Stroke A + Stroke Y X LZ LX 4 x LD Outward mounting Included parts Foot bracket Body mounting bolt Y LS + Stroke X LS1 Foot Bracket [mm] Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 16 30 to 100 106.5 77.1 16.1 5.4 6.6 2.8 24 2.3 48 40.3 62 9.2 5.8 101 to 300 126.5 97.1 25 30 to 100 142.3 104.5 19.8 8.4 6.6 3.5 30 2.6 57 51.5 71

Bag Filter

FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.