e

30 30 20 20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25

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25 25 25 ZPY100 10 12 15 25 41 52 75 86 6 ZPV16 j6, ~16D 16 e26 42 7 '1a 53 70 +87 Applicable tube ,mm ZP20 I Applicable tube 0.0' ~ Q I>R' ZPY25 30 30 28 30 30 28 30 30 28 30 30 28 N4 (Nylon tube .4/2.5) 14.5 5 1.8 ZPY?2 , ~Y40 36 34 36 33 37 35 , 36 34 I ',ills (fIyjon tuIMIIl!

SQ1000/2000

AXT661-12AL AXT661-12AL AXT661-14AL AXT661-14ANL AXT661-13ANL AXT661-13AL 300mm 300mm AXT661-14AL-6 AXT661-14ANL-6 AXT661-13ANL-6 AXT661-13AL-6 600mm 600mm AXT661-14AL-10 AXT661-14ANL-10 AXT661-13ANL-10 AXT661-13AL-10 1000mm 1000mm AXT661-14AL-20 AXT661-14ANL-20 AXT661-13ANL-20 AXT661-13AL-20 2000mm 2000mm AXT661-14AL-30 AXT661-14ANL-30 AXT661-13ANL-30 AXT661-13AL-30 3000mm 3000mm Note) When

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

FX D N MM H A AL 3 K Width across flats KA F FX ZZ + Stroke S + Stroke N (mm) B1 36 30 26 22 ND 20-0.033 0 34 31 31 27 H1 AL MM FX 32-0.039 0 7 5.5 5.5 5 K I H FF GB GC KA 22 22 GA ZZ S P N F D A 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 104 78 76 76 24 22 22 18 42.5 34.5 30 24 40 32 25 20 21 19.5 19.5 15.5 14 12 10 8 30.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 17

SMC Pneumatic Clean Series

4-FF 2-P (Rc, NPT, G) Width across flats B1 I NDh8 D MM FX K AL F 3 NB N A NA H S + Stroke ZZ + Stroke (mm) 36 30 26 22 ND 20-0.033 0 AL MM NA FX GB 22 22 GA ZZ S P N F D A B1 NB 32-0.039 0 7 5.5 5.5 5 K I GC 34 31 31 27 H1 H FF 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 8 8 40 32 25 20 15 15 6 6 5 17 17 13 6 6 42.5 34.5 30 24

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SYJ3000-22-1 SY114-lll Note white white white Body Piston plate End cover Piston Spool Ass'y y u q w e r t VQZ VQD How to Order Pilot Valve Assembly How to Order Connector Assembly VZS VFS : SY100-30-4ASY114 5 G DC VS : SY100-30-1A100V AC Voltage VS7 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC50/60Hz 200V AC50/60Hz 110V AC50/60Hz [115V AC50/60Hz] 5 6 V S R 1 2 : SY100-30-2A200V AC : SY100-30-

CJ5-S

29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22

CJ5-S

29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

CG5-S

29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion bracket CD (shaft) 8 Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 32 10 141 7 11 4

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Compact Slide Series MXH

46 47 20 20 23 5 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4 x M4 x 0.7 Depth 6 5 + Stroke 12 LT NS LB J LA Stroke (mm) 5 14 49 4 10 10 14 10 49 4 15 59 24 20 4 20 59 24 4 20 25 30 69 4 30 30 30 30 69 4 40 20 79 45 20 6 50 89 55 25 6 25 60 60 99 6 30 30 26 Compact Slide Series MXH Dimensions: 16 LT MXH 24 16 MXU LA LB 14 J x M4 x 0.7 Depth 9 MXS MXQ 3 x M5 x 0.8

CG5-S

29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion bracket CD (shaft) 8 Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 32 10 141 7 11 4

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSS-S5 30 LECSS-S7 10 30 100 LECSS-S8 10 30 100 Note 1. Always install a cooling fan. 2. Values in parentheses assume the installation of a cooling fan. (3) Parameter setting Set parameter No.PA02 according to the option to be used.

VFS

For 30 type, common external pilot (on manifold side).

IIIIIII

Cam Lever(-01) 30" 2.29o.71 45. 0.98 (0.3) ffiffiffi CHANGING PUSH BUTTONS One-WayCam Lever(-02) 30" 2 29(O.71 45" 0.98 (0.3) Plunqer(-05) 0.65 (0.2) Roller Plunoer. Inllne {{6) 30' 0.98 (0.3) Roller Plunoer.

Mechanical Valves Series NVM, NVFM, NVZNI

Cam Lever(-01) 30" 2.29o.71 45. 0.98 (0.3) ffiffiffi CHANGING PUSH BUTTONS One-WayCam Lever(-02) 30" 2 29(O.71 45" 0.98 (0.3) Plunqer(-05) 0.65 (0.2) Roller Plunoer. Inllne {{6) 30' 0.98 (0.3) Roller Plunoer.

HRS100/150

HECR Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRS100-A/W-20 30 30 Mechanical button HRS150-A/W-20 40 Earth leakage breaker HEC HEB * 400 V type is equipped as standard. HED * Cannot be selected together with option B1.